等离子固相外沉积大尺寸石英套管研究

发布时间：2018-09-10 07:24

【摘要】：本文对以高频等离子体为热源,以天然高纯石英粉料为原料,用固相外沉积方法制备光纤预制棒用大尺寸石英套管的沉积技术进行研究,并在研究的基础上改进实验装置。熔制过程为:在高频电磁场作用下,用氩气引弧后引燃压缩空气,形成等离子火焰,合适微量元素含量和粒度分布的石英粉料通过供料系统自动传输到等离子燃烧器附近,经等离子火焰高温加热熔融,熔融后的石英粉料附着在旋转的中心基础管上,使其直径逐渐逐层沉积增长,最终制成一定规格尺寸及精度的大尺寸石英套管。设计开发改进的高频等离子体感应设备的阳极范围为10～12KV,熔制温度1800～2100℃,沉积速率为21～23g/min。实验结果表明,使用天然高纯石英粉料利用高频等离子体为热源,采用固相外沉积方式可以制备出单模光纤预制棒用大尺寸石英套管。利用高频等离子固相外沉积法熔制天然高纯石英粉料制备的大尺寸石英套管,具有规格尺寸大(直径≥150mm以上)、羟基含量低(OH≤1Oppm)、微量元素含量少(12种微量元素含量≤15ppm)、玻璃化程度高及折射率适宜等特点。制备出的大尺寸石英套管通过后续的制棒拉丝实验,可以满足光纤制备对大尺寸石英套管的需求。
[Abstract]:In this paper, the deposition technology of large size quartz casing for optical fiber preform rod by solid phase external deposition with high frequency plasma as heat source and natural high purity quartz powder as raw material is studied. The experimental device is improved on the basis of the research. The melting process is as follows: under the action of high frequency electromagnetic field, the compressed air is ignited by argon after arcing, and the plasma flame is formed. The quartz powder with suitable trace element content and particle size distribution is automatically transferred to the plasma burner through the feeding system. After the plasma flame is heated and melted at high temperature, the fused quartz powder is attached to the rotating central base tube, and its diameter is gradually increased layer by layer. Finally, a large size quartz casing with certain size and precision is made. The anodic range of the improved high frequency plasma induction equipment is 10 ~ 12 KV, the melting temperature is 1800 ~ 2100 鈩，

本文编号：2233773