石英晶片研磨加工的试验研究
发布时间：2019-02-13 17:24
【摘要】：在微电子领域,石英晶片主要用于制造石英晶振器件。石英晶片的质量直接影响晶振的性能与可靠性,而研磨是保证石英晶片表面质量的重要工艺措施。本文采用行星式双面研磨机对石英晶片进行了研磨加工试验,研究了研磨区压强对加工效率的影响。试验结果表明,在相同工艺条件下,材料去除量随着研磨区压强的增大而增大。
[Abstract]:In that micro-electronic field, the quartz crystal sheet is mainly used for manufacturing the quartz crystal vibration device. The quality of the quartz crystal sheet directly influences the performance and reliability of the crystal vibration, and the grinding is an important technical measure to ensure the surface quality of the quartz crystal sheet. The effect of the pressure on the processing efficiency of the grinding area is studied in this paper by the grinding and processing of the quartz crystal by the planetary gear grinding machine. The experimental results show that the removal of material increases with the increase of the pressure in the grinding area under the same process conditions.
【作者单位】： 沈阳理工大学;
【分类号】：TQ127.2
本文编号：2421779
[Abstract]:In that micro-electronic field, the quartz crystal sheet is mainly used for manufacturing the quartz crystal vibration device. The quality of the quartz crystal sheet directly influences the performance and reliability of the crystal vibration, and the grinding is an important technical measure to ensure the surface quality of the quartz crystal sheet. The effect of the pressure on the processing efficiency of the grinding area is studied in this paper by the grinding and processing of the quartz crystal by the planetary gear grinding machine. The experimental results show that the removal of material increases with the increase of the pressure in the grinding area under the same process conditions.
【作者单位】： 沈阳理工大学;
【分类号】：TQ127.2
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