炮钢表面磁控溅射制备TiAlVN膜层及性能的研究

发布时间：2018-01-21 04:00

本文关键词： 磁控溅射 TiAlN膜层 TiAlVN膜层摩擦系数热震循环次数　出处：《沈阳工业大学》2017年硕士论文　论文类型：学位论文

【摘要】：火炮身管寿命是火炮服役中一项重要指标。电镀铬是提高火炮身管使用寿命最为常见的方法之一,然而脆性大、易脱落。虽新兴的延寿技术诸多,但考虑到环保与经济等因素,炮管延寿仍有难题亟待解决。因此,拓展火炮身管延寿技术显得尤为重要。本文采用磁控溅射技术在炮钢表面沉积具有不同Al/Ti的TiAlN膜层。然后,在优化工艺参数的基础上制备不同V含量的TiAlVN膜层。系统的研究了不同Al/Ti对TiAlN膜层性能的影响和V含量的变化对TiAlVN膜层性能的影响。其中,选用金相显微镜、激光共聚焦显微镜和扫描电子显微镜(配有能谱仪)对膜层的组织形貌和化学成分进行检测和分析;用X射线衍射仪对膜层相结构进行分析;用G2000型纳米压痕仪和MFT-4000型多功能材料表面性能测试仪对膜层纳米硬度、弹性模量和摩擦磨损性能进行检测与分析;用SX2-6-13型箱式炉对膜层抗热震性能进行分析。试验结果表明:通过磁控溅射技术制备出的TiAlN膜层和TiAlVN膜层表面平整致密,表面粗糙度可达十纳米级别。同时,可获得较均匀的纳米晶结构。两种膜层都是TiN基的置换固溶体,主要基于TiN(200)、(220)晶面择优生长。对比炮钢基材,TiAlN膜层的硬度和弹性模量显著提高。当Al/Ti=1.35时,其膜层的硬度、弹性模量最高可提升3.4倍、1.38倍。当A1/Ti=0.88时,硬度略有下降,但抗磨损性能和抗热震能力相对最佳,其中平均摩擦系数最低可达0.47。综合考虑后,优选Al/Ti=0.88时参数作为添加V元素的基础参数。相比TiAlN膜层,增添V元素的TiAlVN膜层的晶粒簇尺寸增大,但排列更加均匀致密。其次,在力学性能方面得到了不同程度地提高,在硬度方面提升近1.3倍。尤其抗磨损性能显著提升,平均摩擦系数最低降约70%,膜层的磨痕主要表现为磨粒磨损和氧化磨损联合机制。同时,在抗热震性能方面表现优异,TiAlVN膜层在V=12.25at.%时,其抗热震循环次数是TiAlN膜层的1.55倍。该研究为火炮延寿技术拓展了新思路,为火炮身管延寿技术生产实践提供技术支持与借鉴。
[Abstract]:The lifetime of gun barrel is an important index in the service of gun. Chromium plating is one of the most common methods to improve the service life of gun barrel. However, it is brittle and easy to fall off. However, considering the environmental and economic factors, there are still some problems to be solved. It is very important to develop the technique of extending the life of gun barrel. In this paper, TiAlN film with different Al/Ti is deposited on the surface of gun steel by magnetron sputtering. Then. TiAlVN films with different V content were prepared on the basis of optimizing process parameters. The effects of different Al/Ti on the properties of TiAlN films and the changes of V content on TiAlVN coatings were systematically studied. The effect of performance. Metallographic microscope, laser confocal microscope and scanning electron microscope (EDS) were used to detect and analyze the microstructure and chemical composition of the film. The phase structure of the film was analyzed by X-ray diffractometer. The nano-hardness, elastic modulus and friction and wear properties of the film were tested and analyzed by G2000 nano-indentation instrument and MFT-4000 multifunctional material surface property tester. The thermal shock resistance of the film is analyzed by SX2-6-13 box furnace. The experimental results show that the surface of TiAlN film and TiAlVN film prepared by magnetron sputtering is smooth and compact. The surface roughness can reach 10 nanometers. At the same time, more uniform nanocrystalline structure can be obtained. Both kinds of films are TiN based replacement solid solution, mainly based on TiN200). The hardness and elastic modulus of TiAlN film are improved significantly compared with that of Gun steel substrate. When Al / Ti = 1.35, the hardness of TiAlN film is improved. The highest modulus of elasticity can be increased by 3.4 times to 1.38 times. When A _ 1 / Ti _ (0.88) is 0.88, the hardness decreases slightly, but the wear resistance and thermal shock resistance are the best. The average friction coefficient can be as low as 0.47.After considering synthetically, the parameters of Al/Ti=0.88 are selected as the basic parameters of adding V element, compared with TiAlN film. The grain size of the TiAlVN film with V element increased, but the arrangement was more uniform and compact. Secondly, the mechanical properties of the TiAlVN film were improved in varying degrees. The hardness is about 1.3 times higher, especially the wear resistance is improved significantly, the average friction coefficient is the lowest about 70%. The wear marks of the film mainly show the joint mechanism of abrasive wear and oxidation wear. At the same time. The excellent thermal shock resistance of TiAlVN film is at 12.25at.%. The frequency of thermal shock resistance cycle is 1.55 times of that of TiAlN film. This research has developed a new way of thinking for gun life extension technology and provided technical support and reference for the production practice of gun barrel life extension technology.
【学位授予单位】：沈阳工业大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TG174.4

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