光发射谱对CrTiAlN涂层性能的影响

发布时间：2018-02-10 21:29

  本文关键词： CrTiAlN涂层 光发射谱 SDC冷作模具钢 非平衡磁控溅射 磨损　出处：《中国有色金属学报》2017年04期 　论文类型：期刊论文

【摘要】：在不同光发射谱(OEM)条件下,采用闭合场非平衡磁控溅射技术(CFUBMSIP)在SDC99冷作模具钢表面沉积CrTiAlN涂层,采用X射线衍射仪(XRD)、显微硬度仪、原位纳米力学测试系统和销盘摩擦磨损试验机(POD)测试分析涂层的相结构、表面硬度以及耐磨损性能。结果表明:各条件下制备的CrTiAlN涂层均为FCC结构,且在(200)晶面择优取向;光发射谱值为65时,制备的CrTiAlN涂层具有较高的表面承载能力以及膜基结合力,纳米硬度和弹性模量分别为22.7 GPa和276.4 GPa;OEM65制备的CrTiAlN涂层较OEM70、OEM80制备的CrTiAlN涂层具有更低的摩擦因数和磨损率,表现出更佳的摩擦磨损性能。
[Abstract]:Under different optical emission spectra (OEMs), CrTiAlN coating was deposited on the surface of SDC99 cold die steel by closed field unbalanced magnetron sputtering technique, and the microhardness was measured by X-ray diffractometer. The phase structure, surface hardness and wear resistance of the coatings were analyzed by in-situ nano-mechanical testing system and pin disk friction and wear tester. The results showed that the CrTiAlN coatings prepared under various conditions were of FCC structure and preferred orientation on the crystal plane. When the optical emission spectrum is 65, the CrTiAlN coating has high surface bearing capacity and membrane adhesion. The nano-hardness and modulus of elasticity are 22.7 GPa and 276.4 GPaOOEM65, respectively. The CrTiAlN coating has lower friction coefficient and better wear rate than the CrTiAlN coating prepared with OEM70 and OEM80, showing better tribological and wear properties.
【作者单位】： 上海大学材料科学与工程学院;
【分类号】：TG174.4
，

本文编号：1501477