真空热处理对多弧离子镀TiAlSiN涂层性能的影响

发布时间：2018-03-31 23:07

  本文选题：TiAlSiN涂层　切入点：真空热处理　出处：《中国表面工程》2017年01期

【摘要】：为提高TiAlSiN涂层的力学性能,研究了真空热处理对多弧离子镀TiAlSiN涂层微观组织和力学性能的影响。利用扫描电子显微镜(SEM)、X射线衍射仪(XRD)、自动划痕仪、纳米压痕仪、摩擦磨损测试仪等表征其表面形貌、物相组成和力学性能。结果表明:热处理引起了涂层的晶格畸变,降低了TiN固溶体相的平均晶格常数,导致其衍射峰向高角度偏移;热处理会粗化涂层表面,并导致TiAlSi中间过渡层界面消失。经过800℃热处理后,涂层的纳米硬度和结合力达到最大值,分别为35.01 GPa和54.45 N;涂层的平均摩擦因数最小,由热处理前的0.679降低至0.372,比热处理前下降了约45.2%。
[Abstract]:In order to improve the mechanical properties of TiAlSiN coatings, the effect of vacuum heat treatment on the microstructure and mechanical properties of multi-arc ion plating TiAlSiN coatings was studied.The surface morphology, phase composition and mechanical properties were characterized by scanning electron microscope (SEM), automatic scratch tester, nano-indentation instrument and friction and wear tester.The results show that the lattice distortion of the coating is induced by heat treatment, the average lattice constant of TiN solid solution phase is reduced, and the diffraction peak is shifted to a high angle, and the surface of the coating is coarsened and the interface of the TiAlSi intermediate layer disappears after heat treatment.After heat treatment at 800 鈩，

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