纳微米高硅涂层的制备及性能研究

发布时间：2018-04-28 16:32

本文选题：物理气相沉积 + TiAlSiN　；参考：《上海应用技术大学》2017年硕士论文

【摘要】：TiAlN是商品化并使用非常广的一种单层涂层。在应用过程中容易因冲击和振动而造成涂层脆性剥落,形成上述现象最重要的原因为涂层的膜结构及裂纹在扩展中无障碍或路径太短。为改善TiAlN涂层性能,本文利用辉光放电及离子溅射技术,对TiAlN涂层进行Si元素掺杂制备TiAlSiN超硬涂层。结合计算机图像处理技术对比分析了 TiAlN及TiAlSiN涂层的微观组织结构。采用试验方法对两种涂层的物理性能进行定量的描述。采用计算机数值模拟技术、理论计算及实验相结合的方法分析了无涂层刀具及不同涂层厚度刀具在相同条件下的切削性能。采用涂层刀具铣削SUS304不锈钢,研究涂层的冲击破坏机理,并对刀具的磨损失效形式及磨损机理进行分析。该研究对于指导涂层生产及应用具有极其重要的意义。获得的主要结论如下:(1)在微观下观察涂层表面有白色颗粒、浅坑及针孔,涂层组织结构致密。TiAlSiN涂层中元素的原子百分含量分别为Ti (23.58)、Al (25.95)、Si (4.21)、N (46.26)。Si元素的掺杂改变了涂层的物相结构,促进了(200)晶体取向的生长。TiAlSiN涂层的微观硬度为37.69GPa,结合力等级为HFI,摩擦系数峰值约为0.36。(2)随着涂层厚度增加,刀具的切削力先降低后升高,切削温度也是如此。在同样的试验条件下,4μm厚度的TiAlSiN涂层刀具在切削TC4及45钢时,具有最小的切削力。3μm厚度的TiAlSiN涂层刀具在切削TC4及45钢时,温度最低。未涂层刀具的磨损量约为涂层刀具磨损量的2-3倍。(3)现场加工实验表明,4μm厚度的TiAlSiN涂层的刀具在车削45钢具有最小的车削力(498.4N)。切削测验获得的切削力值与模拟切削力值的变化趋向一致,切削测验与模拟测验的结果误差在13%以内。(4)干式切削条件下,TiAlSiN涂层刀具的切削长度分别为TiAlN涂层刀具及未涂层刀具的1.5倍和5倍。TiAlSiN涂层刃具的失效模式有两个不同阶段,在表面涂层磨穿之前,刀具的主要承受磨料磨损。待涂层磨穿后,刀具的磨损状态逐渐变为粘着磨损。TiAlSiN涂层更适用于不锈钢的切削加工。
[Abstract]:TiAlN is a commercial and widely used monolayer coating. The brittleness spalling of the coating is easily caused by shock and vibration during application. The most important reason for the above phenomenon is that the membrane structure and crack of the coating are unobstructed or the path is too short. In order to improve the properties of TiAlN coatings, TiAlSiN superhard coatings were prepared by doping Si into TiAlN coatings by glow discharge and ion sputtering techniques. The microstructure of TiAlN and TiAlSiN coatings was analyzed by computer image processing. The physical properties of the two coatings were quantitatively described by means of test. The cutting performance of the uncoated tool and the tool with different coating thickness under the same conditions was analyzed by computer numerical simulation technique, theoretical calculation and experiment. The impact failure mechanism of coating was studied by milling SUS304 stainless steel with coated tool, and the wear failure mode and wear mechanism of the tool were analyzed. This study is of great significance for guiding the production and application of coatings. The main conclusions obtained are as follows: (1) White particles, shallow pits and pinholes are observed on the surface of the coating. The atomic percent content of the elements in the coating is Ti ~ (23.58) Al ~ (25. 95) Si ~ (4. 21) Si ~ (4. 21) N ~ (2 +) 46.26 ~ (2 +) 路Si, respectively. The phase structure of the coating has been changed. The microhardness of TiAlSiN coating is 37.69 GPA, the adhesion grade is HFI, and the peak friction coefficient is about 0.36. 2) with the increase of coating thickness, the cutting force of the cutting tool decreases first and then increases, and the cutting temperature is the same. Under the same experimental conditions, when TC4 and 45 steel are cut by TiAlSiN coated tool with 4 渭 m thickness, the temperature of TiAlSiN coated tool with minimum cutting force of 3. 3 渭 m is the lowest when TC4 and 45 steel are cut. The wear rate of uncoated tools is about 2-3 times as much as that of coated tools. The field machining experiments show that TiAlSiN coated tools with 4 渭 m thickness have the minimum turning force of 498.4 Nu in turning 45 steel. The value of cutting force obtained by cutting test tends to be consistent with the value of simulated cutting force. Under dry cutting conditions, the cutting length of TiAlSiN coated cutting tool is 1.5 times and 5 times of that of TiAlN coated tool and uncoated tool respectively. There are two different failure modes of TiAlSiN coated cutting tool. Before the surface coating is worn out, the tool is mainly subjected to abrasive wear. When the coating is worn out, the wear state of the tool becomes adhesive wear. TiAlSiN coating is more suitable for cutting stainless steel.
【学位授予单位】：上海应用技术大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TG174.4;TG71

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