基于干涉条纹特征分析的主轴回转精度检测方法研究

发布时间：2018-05-04 10:11

本文选题：主轴回转误差 + 动态干涉仪　；参考：《哈尔滨理工大学》2017年硕士论文

【摘要】：随着超精密加工技术的高速发展,人们对于加工零部件的精度要求越来越高。主轴是机床的重要组成部分,机床主轴的回转精度直接决定了加工零件的精度,因此主轴回转精度的检测成为一项极具挑战的课题。此外,开展一种新的测量超精密主轴回转精度的方法,对提高我国超精密加工设备主轴关键部件,以及超精密设备的研制开发具有重要意义。首先,系统的研究了国内外学者提出的各种主轴回转精度检测方法,以及对主轴回转误差原理进行分析,提出了一种新的主轴回转精度检测方法,即采用动态干涉仪测量主轴回转误差。搭建了动态干涉仪测量高精度伺服电机主轴回转误差的实验平台,通过分析干涉条纹的位移量从而计算出主轴回转误差。其次,对干涉条纹图像特征进行深入研究,设计了干涉条纹图像的实时采集系统。基于干涉条纹追踪实现位移测量理论,获取平面平晶在轴向方向的位移。再次,采用动态干涉仪采集平面平晶随伺服电机主轴回转过程中,不同相位的干涉条纹。通过对原始干涉条纹进行图像处理,得到质量较高的干涉条纹边缘图像。对原始干涉条纹依次进行灰度值处理、中值滤波处理、膨胀腐蚀处理、二值化、以及边缘提取等处理方法。最后选取相邻干涉条纹等灰度值的像素点进行追踪,以获取主轴轴向回转误差。最后,搭建了基于干涉条纹特征分析的伺服电机主轴轴向回转精度检测系统,并进行了实验。通过实验数据验证了本文这种主轴回转误差测量方法的准确性和适用性,并在此基础上对实验误差进行了分析。
[Abstract]:With the rapid development of ultra-precision machining technology, the precision of machining parts is becoming more and more high. Spindle is an important part of machine tools. The precision of spindle rotation directly determines the precision of machining parts. Therefore, the measurement of spindle rotation accuracy has become a very challenging task. In addition, it is of great significance to develop a new method for measuring the rotation accuracy of ultra-precision spindle, which is of great significance to the improvement of the key parts of the spindle of ultra-precision machining equipment in China, as well as to the research and development of ultra-precision equipment. First of all, this paper systematically studies all kinds of spindle rotation accuracy detection methods proposed by domestic and foreign scholars, and analyzes the principle of spindle rotation error, and puts forward a new spindle rotation accuracy detection method. Dynamic interferometer is used to measure the rotation error of spindle. An experimental platform for measuring the spindle rotation error of high precision servo motor with dynamic interferometer is set up, and the spindle rotation error is calculated by analyzing the displacement of interference fringes. Secondly, a real-time acquisition system of interference fringe image is designed. Based on the theory of interferometric fringe tracking, the displacement of flat crystal in axial direction is obtained. Thirdly, dynamic interferometer is used to collect the interference fringes with different phases in the rotation process of plane flat crystal with the main axis of servo motor. The edge image of interference fringes with high quality is obtained by processing the original interference fringes. The original interference fringes are processed with gray value, median filter, expansion corrosion, binarization, edge extraction and so on. Finally, the pixels of adjacent interference fringes and other gray values are selected to track to obtain the axial rotation error of the spindle. Finally, an axial rotation precision measurement system of servo motor spindle based on interference fringe feature analysis is built and the experiment is carried out. The accuracy and applicability of this method are verified by experimental data, and the experimental error is analyzed.
【学位授予单位】：哈尔滨理工大学
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TG502.3

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