多孔质空气静压主轴动态回转误差的影响机理分析

发布时间：2018-05-06 06:28

本文选题：多孔质 + 空气静压轴承　；参考：《工程科学与技术》2017年05期

【摘要】：为了有效解决多孔质空气静压主轴回转误差在理论上无法定量精确求解的难题,提出了一种基于计算流体力学和动态网格技术的回转精度预测方法。首先根据实验测量数据分析规律采用频率和幅值相结合的方式对主轴转子的圆度误差进行几何建模,建立了不同波形、不同幅值下的几何模型。然后在FLUENT平台下利用动态网格技术,并采用瞬态分析方法同时求解N-S方程和牛顿运动定律,研究了不同波形、不同幅值下转子的X/Y向受力、速度分布、压力分布、位移轨迹的变化规律,实现圆度误差对回转误差的影响规律研究。仿真结果表明:圆度误差是影响多孔质空气静压主轴回转误差的主要因素,回转误差随着误差幅值的增加而显著恶化,偶波造成的回转误差明显低于奇波误差,随波数的增加,回转误差降低。最后搭建高精度回转误差测量实验平台,对自行研制的多孔质空气静压主轴回转误差进行测量,测得回转误差为50 nm(其中包含垂直度、圆柱度、圆度等引起的回转误差),计算求得的圆度误差为23 nm占回转误差的46%,得出圆度误差是影响主轴回转精度的主要因素,也验证了所采用的回转误差分析方法的有效性和准确性。
[Abstract]:In order to effectively solve the problem that the rotation error of porous air static pressure spindle can not be solved accurately and quantitatively in theory, a method for predicting the accuracy of rotation based on computational fluid dynamics and dynamic grid technology is proposed. Firstly, the roundness error of spindle rotor is modeled by the combination of frequency and amplitude according to the law of experimental data analysis, and the geometric models with different waveforms and different amplitudes are established. Then using dynamic grid technology on FLUENT platform and using transient analysis method to solve N-S equation and Newton's law of motion simultaneously, the X / Y direction force, velocity distribution and pressure distribution of rotor with different waveforms and different amplitudes are studied. The influence of roundness error on rotation error is studied. The simulation results show that the roundness error is the main factor affecting the rotation error of the porous air static pressure spindle. The rotation error deteriorates significantly with the increase of the amplitude of the error, and the rotation error caused by even wave is obviously lower than that caused by odd wave, and increases with the increase of wave number. The rotation error is reduced. At last, a high precision experiment platform is built to measure the rotary error of the porous air static pressure spindle. The error is 50 nm (including the vertical degree, the cylinder degree, the vertical degree and the cylinder degree). The roundness error caused by roundness is 46% of the rotation error at 23 nm. It is concluded that roundness error is the main factor affecting the rotation accuracy of the spindle, and the validity and accuracy of the analytical method are verified.
【作者单位】：电子科技大学机械电子工程学院;中国工程物理研究院机械制造工艺研究所;
【基金】：国家自然科学基金委员会与中国工程物理研究院联合基金委员会资助项目(U1530130)
【分类号】：TG502.13

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