Zr掺杂类金刚石薄膜摩擦性能及耐腐蚀性能的影响

发布时间：2018-06-01 23:27

本文选题：Zr掺杂类金刚石膜 + 显微结构　；参考：《表面技术》2017年06期

【摘要】：目的改善不锈钢摩擦性能及耐腐蚀性能。方法通过线性阳极层离子源辅助非平衡磁控溅射法,制备了不同Zr含量的类金刚石(DLC)薄膜,采用扫描电子显微镜、拉曼光谱仪、纳米硬度仪、高温销盘磨损仪、电化学工作站,对薄膜的化学成分、显微结构、纳米硬度、薄膜摩擦性能及耐腐蚀性能进行测试研究。结果随着Zr靶功率的增大,Zr含量线性增加。Zr含量从4.9%增加至16.3%时,I_D/I_G增大,薄膜硬度从12.1 GPa逐渐下降至8.4 GPa;Zr含量增大至21.2%时,I_D/I_G减小,薄膜硬度增大至11.4 GPa。涂镀类金刚石薄膜的不锈钢基体比无涂层的不锈钢基体有更低的摩擦系数,更好的耐磨损性能。Zr掺杂DLC薄膜的最小摩擦系数为0.07。Zr含量从4.9%增加至16.3%,DLC薄膜的耐腐蚀性能减弱;Zr含量继续增加,DLC薄膜的耐腐蚀性能增强。当Zr含量不大于11.9%时,沉积Zr掺杂DLC膜的不锈钢基体的耐腐蚀性能比不锈钢基体的更强。结论 Zr含量不大于11.9%时,Zr掺杂类金刚石薄膜既可以有效地改善不锈钢基体的摩擦磨损性能,又可以大幅提高耐腐蚀性能。
[Abstract]:Aim to improve the friction and corrosion resistance of stainless steel. Methods Diamond-like carbon (DLC) thin films with different Zr content were prepared by linear anodic ion source assisted unbalanced magnetron sputtering. Scanning electron microscopy, Raman spectroscopy, nano-hardness tester, high-temperature pin disk wear tester, electrochemical workstation were used. The chemical composition, microstructure, nano hardness, tribological properties and corrosion resistance of the films were studied. Results with the increase of Zr target power, the linear increase of Zr content and the increase of Zr content from 4.9% to 16.3%, the hardness of thin films gradually decreased from 12.1 GPa to 8.4 GPA Zr content to 21.2 GPa-Zr content, and the hardness of the films increased to 11.4 GPa.The hardness of the films increased to 11.4 GPa.Results with the increase of the power of Zr target, the content of Zr and Zr increased linearly from 4.9% to 16.3%, and the hardness of the films increased to 11.4 GPa. The friction coefficient of stainless steel coated with diamond-like carbon film is lower than that of stainless steel without coating. The minimum friction coefficient of Zr-doped DLC thin films is that the 0.07.Zr content is increased from 4.9% to 16.3DLC thin films. The corrosion resistance of DLC films decreases and Zr content continues to increase and enhance the corrosion resistance of DLC films. When Zr content is less than 11.9%, the corrosion resistance of the deposited Zr-doped DLC film is stronger than that of the stainless steel substrate. Conclusion Zr doped diamond-like carbon films with Zr content less than 11.9 can not only improve the friction and wear properties of stainless steel substrates, but also improve the corrosion resistance of stainless steel substrates.
【作者单位】：重庆大学材料科学与工程学院;四川理工学院材料腐蚀与防护四川省重点实验室;
【基金】：材料腐蚀与防护四川省重点实验室开放基金资助(2016CL13) 重庆市基础与前沿研究计划项目(cstc2015jcyjA70005)~~
【分类号】：TG174.4

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