纳米铝涂层制备及其对沉积态铀薄膜的防护性能研究
发布时间：2018-09-17 16:10
【摘要】：为探索沉积态贫铀(DU)薄膜更有效的防护层新材料与更薄的防护层制备技术,开展了纳米Al涂层的磁控溅射制备技术研究,制备了Al与DU单层、Al/DU/Al三层薄膜样品,并开展了纳米Al防护层Al/DU/Al样品大气环境下72 h的防氧化性能研究。利用扫描电镜(SEM)观察样品表面形貌,X射线光电子能谱仪(XPS)测量样品元素组成与价态变化,X射线衍射(XRD)测量样品物相组成与变化。结果表明:厚度大于10 nm即可生成连续的Al涂层,Al涂层晶粒随着厚度增加呈现长大的趋势;30 nm厚Al防护涂层有效阻止了DU薄膜大气环境的氧化:72 h内,DU层O含量没有发现明显的变化。
[Abstract]:In order to explore a more effective new material and thin protective layer for depositing depleted uranium (DU) thin films, the magnetron sputtering technique for preparing nanocrystalline Al coatings was studied. Three layers of Al and DU monolayer Al / du / Al thin films were prepared. The oxidation resistance of nanometer Al protective layer Al/DU/Al samples in atmosphere for 72 h was studied. Scanning electron microscopy (SEM) was used to observe the surface morphology of samples. X-ray photoelectron spectroscopy (XPS) was used to measure the changes of element composition and valence state. X-ray diffraction (XRD) was used to measure the phase composition and change of samples. The results show that when the thickness is more than 10 nm, the grain size of the continuous Al coating can grow up with the increase of thickness. The thickness of the Al protective coating of 30 nm can effectively prevent the oxidation of the DU film in atmospheric environment within 72 h, and the O content of the DU layer can be effectively prevented. No obvious change was observed.
【作者单位】： 中国工程物理研究院;
【分类号】：TG174.44
，
本文编号：2246444
[Abstract]:In order to explore a more effective new material and thin protective layer for depositing depleted uranium (DU) thin films, the magnetron sputtering technique for preparing nanocrystalline Al coatings was studied. Three layers of Al and DU monolayer Al / du / Al thin films were prepared. The oxidation resistance of nanometer Al protective layer Al/DU/Al samples in atmosphere for 72 h was studied. Scanning electron microscopy (SEM) was used to observe the surface morphology of samples. X-ray photoelectron spectroscopy (XPS) was used to measure the changes of element composition and valence state. X-ray diffraction (XRD) was used to measure the phase composition and change of samples. The results show that when the thickness is more than 10 nm, the grain size of the continuous Al coating can grow up with the increase of thickness. The thickness of the Al protective coating of 30 nm can effectively prevent the oxidation of the DU film in atmospheric environment within 72 h, and the O content of the DU layer can be effectively prevented. No obvious change was observed.
【作者单位】： 中国工程物理研究院;
【分类号】：TG174.44
，
本文编号：2246444
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