基于厚层模板的微坑阵列微细电解加工技术研究
发布时间：2018-12-20 16:37
【摘要】：具有一定尺寸和分布的微坑阵列在改善摩擦副摩擦性能方面发挥着重要的作用,它不仅能够减小摩擦副之间的摩擦系数,还能够降低磨损提高摩擦副的使用寿命。例如,航天齿轮泵作为水循环系统的传动部件,其齿轮端面和壳体密封端面磨损严重时会严重影响齿轮泵的工作效率和整个水循环系统的可靠运行。研究表明在齿轮泵壳体密封端面设计具有一定尺寸和分布的微坑阵列可以有效地改善润滑状况,降低齿轮与密封端面的磨损量,从而提高齿轮泵的运行效率和使用寿命。微坑阵列已在摩擦学、热能交换以及生物医学等领域得到重要的应用,因此,如何高效、高精度加工微坑阵列成为一个研究的重点。目前,微坑阵列的加工方法主要有机械加工、激光加工、电火花加工、磨粒流加工和电解加工。其中,电解加工技术因在加工中无热影响区、无热应力、电极无损耗、易于实现微细加工等优点,成为研究的热点。易实现大面积微坑阵列一次加工成形的光刻微细电解加工技术是目前备受关注的一种微坑阵列电解加工方法。光刻微细电解加工技术是利用光刻工艺在工件表面制作具有镂空图案的模板,从而对工件进行选区域电解加工的方法。其每个工件都需要经过涂胶、前烘、曝光、显影和后烘等一系列工艺,电解加工之后还需要除去光刻胶,制作过程复杂,生产流程长。在一次加工大量微坑时存在微坑尺寸不一致,加工精度差的问题。此外,单个微坑的形貌也不规则,在微坑中心位置容易形成凸起的结构(通常称之为“孤岛”)。针对上述问题,本文探索了提高微坑光刻电解加工的加工精度以及消除“孤岛”的方法,并将厚层活动模板引入微坑阵列的电解加工,开展微坑阵列的厚层模板电解加工技术研究。本文完成的研究内容主要包含以下几个部分:(1)提出采用正电位辅助阳极和厚层模板方法,提高了微坑阵列电解加工的加工精度,消除了微坑电解加工的“孤岛”现象。仿真和试验结果表明,具有合适正电位的辅助阳极可以有效改善微坑阵列的加工精度,此外使用厚层模板不仅能够改善微坑阵列的加工精度,而且有效避免了微坑“孤岛”现象的产生。(2)发明一种聚二甲基硅氧烷(PDMS)微孔模板的制作方法。通过改进光刻工艺,并结合真空辅助模塑法,探索出一种新的PDMS微孔模板的制作方法,并利用该方法成功制备出孔径为50μm和100μm,厚度250μm的PDMS厚层微通孔模板。由于PDMS具有良好的化学稳定性,在电解加工中可以重复使用,这可以缩短工艺准备时间,从而提高微坑阵列的生产效率。(3)优选出适合PDMS厚层模板微细电解加工的电解液流动模式。通过对不同的电解液流动模式下电解加工微坑质量对比分析,优选出一种电解液正向流动模式,并设计出具有群缝结构的阴极。结果表明,采用此种流动模式不仅保证了PDMS厚层模板与工件的贴合,还避免了加工中由于柔性模板变形导致的微坑形貌变形,有助于实现高质量微坑阵列的微细电解加工。(4)发现PDMS厚层模板电解加工具有对加工参数不敏感的优点,阐明了该技术能够获得高加工精度的原因。试验结果表明,微坑的深度仅随加工时间改变,而对加工电压敏感性低。此外,随加工电压和时间的变化,微坑的直径均仅有3~5μm的侧向腐蚀,具有高的加工精度。通过电流效率计算、流场仿真以及CCD在线观测,指出采用PDMS厚层模板电解加工时,加工区的电解液始终处于高压低流速状态,此状态不仅能够减小气泡的体积也减缓了气泡和不溶性产物的排出,而且大部分气泡和产物的混合体会聚集在微坑的边缘,有效降低了微坑电解加工的侧向腐蚀,提高了微坑电解加工的加工精度。(5)开展了微坑阵列的PDMS厚层模板微细电解加工应用研究。对不锈钢密封端面进行微坑阵列的电解加工,使齿轮泵使用寿命提高了一倍;在镀铬层表面微细电解加工出微坑阵列,摩擦学试验结果表明,方形微坑阵列比圆形微坑阵列有更加明显的减摩效果,具有方形微坑阵列的表面较光滑表面的最高减摩率可达40%。
[Abstract]:The micro-pit array with a certain size and distribution plays an important role in improving the friction performance of the friction pair, and not only can reduce the friction coefficient between the friction pairs, but also can reduce the wear and improve the service life of the friction pair. For example, as a transmission component of a water circulation system, a space gear pump can seriously affect the working efficiency of the gear pump and the reliable operation of the whole water circulation system when the gear end surface and the seal end face of the shell seal are seriously worn. The research shows that the design of a micro-pit array with a certain size and distribution on the sealing end surface of the gear pump shell can effectively improve the lubrication condition, reduce the wear amount of the gear and the sealing end face, and improve the operation efficiency and the service life of the gear pump. The micro-pit array has been widely used in the fields of tribology, thermal energy exchange and biomedicine. Therefore, how to process the micro-pit array with high efficiency and high precision becomes the focus of a research. At present, the processing method of the micro-pit array mainly includes machining, laser processing, electric spark machining, abrasive flow processing and electrolytic processing. in which, the electrolytic processing technology has the advantages of no thermal influence area, no thermal stress, no electrode loss, easy realization of fine processing and the like in the processing, and has become the hot spot of the research. The invention relates to a micro-pit array electrolytic processing method which is easy to realize one-time machining and forming of a large-area micro-pit array. the invention relates to a photoetching micro-electrolysis processing technology, which comprises the following steps of: making a template with a blank pattern on the surface of a workpiece by using a photoetching process, so as to carry out selective area electrolysis processing on the workpiece. each of the workpieces needs to be subjected to a series of processes such as gluing, pre-drying, exposure, developing and post-drying, and the photoresist is also required to be removed after the electrolytic processing, and the manufacturing process is complicated and the production flow is long. and the problem that the size of the micro-pits is not uniform and the machining accuracy is poor is solved when a large number of micro-pits are processed at a time. In addition, the topography of a single pit is also irregular, and a raised structure (generally referred to as a 鈥淕udao鈥，
本文编号：2388253
[Abstract]:The micro-pit array with a certain size and distribution plays an important role in improving the friction performance of the friction pair, and not only can reduce the friction coefficient between the friction pairs, but also can reduce the wear and improve the service life of the friction pair. For example, as a transmission component of a water circulation system, a space gear pump can seriously affect the working efficiency of the gear pump and the reliable operation of the whole water circulation system when the gear end surface and the seal end face of the shell seal are seriously worn. The research shows that the design of a micro-pit array with a certain size and distribution on the sealing end surface of the gear pump shell can effectively improve the lubrication condition, reduce the wear amount of the gear and the sealing end face, and improve the operation efficiency and the service life of the gear pump. The micro-pit array has been widely used in the fields of tribology, thermal energy exchange and biomedicine. Therefore, how to process the micro-pit array with high efficiency and high precision becomes the focus of a research. At present, the processing method of the micro-pit array mainly includes machining, laser processing, electric spark machining, abrasive flow processing and electrolytic processing. in which, the electrolytic processing technology has the advantages of no thermal influence area, no thermal stress, no electrode loss, easy realization of fine processing and the like in the processing, and has become the hot spot of the research. The invention relates to a micro-pit array electrolytic processing method which is easy to realize one-time machining and forming of a large-area micro-pit array. the invention relates to a photoetching micro-electrolysis processing technology, which comprises the following steps of: making a template with a blank pattern on the surface of a workpiece by using a photoetching process, so as to carry out selective area electrolysis processing on the workpiece. each of the workpieces needs to be subjected to a series of processes such as gluing, pre-drying, exposure, developing and post-drying, and the photoresist is also required to be removed after the electrolytic processing, and the manufacturing process is complicated and the production flow is long. and the problem that the size of the micro-pits is not uniform and the machining accuracy is poor is solved when a large number of micro-pits are processed at a time. In addition, the topography of a single pit is also irregular, and a raised structure (generally referred to as a 鈥淕udao鈥，
本文编号：2388253
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