Diamond/β-SiC film as adhesion-enhanced interlayer for top d

发布时间：2021-01-05 18:52

　　In present work, diamond/β-SiC composite interlayers were deposited on cemented tungsten carbide（WC-6%Co） substrates by microwave plasma enhanced chemical vapor deposition（MPCVD） using H₂,CH₄ and tetramethylsilane（TMS） gas mixtures. The microstructure, chemical bonding, element distribution and crystalline quality of the composite interlayers were systematically characterized by means of field-emission scanning electron microscopy（FE-SEM）, X-ray diffraction（XRD）, X-ray phot... 

【文章来源】：Journal of Materials Science & Technology. 2017,33(10)

【文章页数】：10 页


本文编号：2959123