固结磨料研磨K9玻璃亚表面损伤研究

发布时间：2018-01-17 16:05

本文关键词：固结磨料研磨K9玻璃亚表面损伤研究　出处：《南京航空航天大学》2015年博士论文　论文类型：学位论文

【摘要】：光学元件在研磨加工过程中产生的亚表面损伤会直接影响其使用寿命、稳定性、成像质量、镀膜质量和抗激光损伤阈值等重要指标。如何准确检测和评价加工过程产生的亚表面损伤以提高加工质量是光学制造业必须解决的关键问题之一。本课题以固结磨料研磨垫(FAP)研磨典型硬脆性光学材料──K9玻璃后亚表面损伤作为研究对象,围绕K9玻璃亚表面损伤的成因与表征研究,探索固结磨料研磨方式下K9玻璃亚表面裂纹的形成与扩展机理、固结磨料研磨加工参数与工件亚表面损伤之间的关系。本文的主要研究工作和研究成果包括以下几个方面:1.提出了BOE分步腐蚀法测量研磨后工件的亚表面损伤层深度。提出了一种光学工件亚表面损伤层厚度测量方法,分析了其检测原理,详细介绍了检测过程,并进行试验验证。将该方法与其它光学硬脆材料亚表面损伤检测方法进行比较。2.单颗磨粒作用下光学材料亚表面初始裂纹的形成与扩展研究。采用循环抛光腐蚀法,对单颗磨粒作用下光学材料亚表面初始裂纹(微米级)进行准确观测;建立了单颗磨粒作用K9玻璃亚表面损伤力学模型,分析了光学材料亚表面微米级初始裂纹的形成与扩展过程;借助ANSYS/LS-DYNA3维动态有限元分析软件对不同载荷下K9玻璃亚表面初始裂纹的形成与扩展过程进行模拟。3.建立了固结磨料研磨K9玻璃的亚表面损伤模型。在单颗磨粒作用光学材料亚表面塑性屈服区模型基础上,分析FAP表面磨粒平均切深情况下,磨粒间距对工件亚表面裂纹(中位裂纹、横向裂纹)的影响;建立FAP表面磨粒突起高度一致(平均切深假设)、不一致(最大切深假设)两种情况下,FAP研磨工艺参数与工件亚表面损伤之间的联系。4.FAP加工玻璃亚表面损伤模型的数值模拟与试验验证。通过BOE分步腐蚀法获得了不同磨粒粒径FAP研磨K9玻璃、熔石英玻璃的亚表面损伤层厚度,建立了磨粒平均粒径与亚表面损伤层深度的数学关系;对FAP加工光学工件亚表面损伤模型进行模拟分析,并与试验结果进行对比。
[Abstract]:The subsurface damage caused by optical elements in the grinding process will directly affect its service life, stability and imaging quality. How to accurately detect and evaluate the subsurface damage caused by the processing process to improve the processing quality is one of the key problems that must be solved in the optical manufacturing industry. Abrasive grinding pad (. FAP lapping a typical hard and brittle optical material, the subsurface damage of K9 glass, as an object of study. The formation and propagation mechanism of subsurface crack in K9 glass was investigated by studying the causes and characterization of subsurface damage of K9 glass. The relationship between grinding parameters of consolidation abrasive and sub-surface damage of workpiece. The main research work and research results in this paper include the following aspects:. 1. BOE step etching method is proposed to measure the depth of the subsurface damage layer of the workpiece after grinding, and a method to measure the thickness of the subsurface damage layer of the optical workpiece is proposed. The detection principle is analyzed and the detection process is introduced in detail. The method is compared with other optical hard brittle material subsurface damage detection methods. 2. The initial crack formation and propagation of optical material under the action of single abrasive particle is studied. Cyclic polishing is used. Corrosion method. The initial subsurface crack (micron level) of optical material under the action of single abrasive particle is observed accurately. A mechanical model of subsurface damage of K9 glass by single abrasive particle is established, and the formation and propagation process of initial micrometer crack on the subsurface of optical material is analyzed. The forming and propagation process of initial crack on the subsurface of K9 glass under different loads was simulated with the help of ANSYS/LS-DYNA3 dynamic finite element analysis software. 3. A consolidation abrasive grinding K9 glass was established. Model of subsurface damage of glass. Based on the model of plastic yield zone of subsurface of optical materials acting on single abrasive particle. The effect of particle spacing on sub-surface crack (median crack, transverse crack) of the workpiece is analyzed under the condition of average cutting depth of FAP surface abrasive particles. The results show that there are two cases: the average cutting depth hypothesis and the inconsistent (maximum cutting depth hypothesis). The relationship between FAP grinding process parameters and sub-surface damage of workpiece. 4. Numerical simulation and experimental verification of subsurface damage model of glass fabricated by FAP. Different particle sizes F were obtained by BOE step etching method. AP ground K9 glass. The thickness of the subsurface damage layer of fused quartz glass is studied. The mathematical relationship between the average particle size and the depth of the subsurface damage layer is established. The subsurface damage model of optical workpiece fabricated by FAP was simulated and analyzed, and the results were compared with the experimental results.
【学位授予单位】：南京航空航天大学
【学位级别】：博士
【学位授予年份】：2015
【分类号】：TG580.68

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