微细电解加工用中空电极的制备

发布时间：2018-02-04 00:53

本文关键词： 微细电解加工中空电极制备工艺流动仿真微细孔微细槽　出处：《光学精密工程》2015年10期 　论文类型：期刊论文

【摘要】：为了改进加工间隙内电解产物的排出条件和加速电解液的更新,提出了一种嵌套式微细中空电极的精确可控焊接制备工艺。仿真分析了电极的过流特性,优化了电极长度,并进行了性能测试及加工实验。通过穿丝、黏结、嵌套尺寸及位置调整和焊接工序,制备出加工段内径为65μm、外径为130μm、长3.25mm左右,后段便于装夹和连通的嵌套式中空电极。在供液压力为1.15 MPa时,其出口流速可达10m/s左右。利用制备的中空电极,开展微细孔电解加工实验,在0.5mm厚不锈钢片上加工出最小入口孔径约为157μm,出口孔径约为133μm的微细孔,并将其延伸应用于微结构加工中,铣削出了长554μm、宽160μm、深224μm的微细T型槽。实验结果表明:制备的微细中空电极有效提高了加工间隙内电解液的流动特性,且连/导通可靠、装夹方便,适用于高深宽比微结构的电解加工。
[Abstract]:In order to improve the electrolytic products in machining gap discharge conditions and accelerated electrolyte renewal, proposes the preparation process the precise control of a nested type micro hollow electrode welding. The simulation analysis of the flow characteristics of the electrodes, optimize the electrode length, and the performance test and experiment. Through the wire, bonding, nested size and position adjustment and welding process, preparation processing section diameter is 65 m, diameter 130 m, length of 3.25mm, to facilitate the nested hollow electrode clamping and connecting the rear section. The liquid supply pressure is 1.15 MPa, the outlet flow rate of up to about 10m/s. The use of hollow electrode preparation and carry out micro electrochemical machining experiments in 0.5mm thick stainless steel sheet is processed on the minimum entrance aperture is about 157 m, about the exit aperture of micro holes of 133 m, and its extension is applied to micro structure machining, milling a length 554 m, width 160 m, depth 224 M The experimental results show that the fabricated micro hollow electrode effectively improves the flow characteristics of electrolyte in the machining gap, and is reliable and easy to operate. It is suitable for the electrochemical machining of high aspect ratio microstructures. T

【作者单位】：清华大学机械工程系精密/超精密制造装备及控制北京市重点实验室;北京信息科技大学仪器科学与光电工程学院;
【基金】：国家自然科学基金资助项目(No.51275255) 江苏省数字化电化学加工重点建设实验室(常州工学院)开放基金资助项目(No.KFJJ2004005)
【分类号】：TG662
【正文快照】： 1引言电解加工(Electrochemical Machining,ECM)是利用金属/溶液界面处的电化学反应,溶解蚀除阳极工件的成形方法,具有不受材料强度、硬度和韧性等因素影响,加工后工件表面质量好、无热影响层和无残余应力等优点[1]。电解加工以离子形式蚀除金属材料,在作用机理上达微/纳尺度

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