基于正交与插值算法的精密抛光平台综合误差建模与补偿

发布时间：2018-02-13 17:12

本文关键词： 抛光机床正交多项式插值算法综合误差模型误差补偿　出处：《光学精密工程》2015年12期 　论文类型：期刊论文

【摘要】：为了提高四轴抛光平台的加工精度,本文针对以气浮平台和旋转台为主要运动方式的四轴抛光平台进行了几何与热综合误差建模与补偿研究。采用激光干涉仪、温度传感器等测量仪器分别对平台X、Z轴在不同温度下的定位误差进行重复测量与分析,证实了不同进给速度对定位误差没有显著影响。得到了四轴抛光平台X、Z轴的定位误差与温度之间的变化规律。基于正交多项式和插值算法分别建立了X、Z轴的几何与热综合误差模型。根据综合误差模型计算出预测数据曲线,并分别对X、Z轴的7组实验数据进行了数据拟合,拟合残差绝对值均不超过0.2μm。依据预测数据进行了补偿实验。结果显示,补偿后四轴抛光平台在常温下、温升(60 min)下和稳态下的Z轴定位误差分别降低了93.05%、92.45%、85.71%,X轴定位误差分别降低了89.28%、93.59%、93.33%。实验结果证明本文所提出的综合模型及补偿方法精度高,鲁棒性好。
[Abstract]:In order to improve the machining accuracy of the four-axis polishing platform, the geometric and thermal comprehensive error modeling and compensation of the four-axis polishing platform based on the air-floating platform and the rotating table are studied in this paper. The laser interferometer is used. The temperature sensor and other measuring instruments are used to repeatedly measure and analyze the positioning error of the XnZ axis of the platform at different temperatures. It is proved that different feed speeds have no significant effect on the positioning error, and the variation law between the positioning error and temperature of the XnZ axis of the four-axis polishing platform is obtained. The geometry of the XZ axis is established based on orthogonal polynomial and interpolation algorithm, respectively. And heat synthesis error model. According to the comprehensive error model, the prediction data curve is calculated. Seven groups of experimental data of XnZ axis were fitted, and the absolute residual values were not more than 0.2 渭 m. Compensation experiments were carried out according to the predicted data. The results showed that the four axis polishing platform after compensation was at room temperature. The Z-axis positioning errors under temperature rise and steady state are reduced by 93.05 / 92.45 and 85.71X axis positioning errors, respectively. The experimental results show that the proposed comprehensive model and compensation method have high accuracy and good robustness.
【作者单位】：吉林大学机械科学与工程学院;长春工业大学机电学院;
【基金】：国家973重点基础研究发展计划资助项目(No.2011CB706702)
【分类号】：TG580.2

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