气浮直线驱动平台定位误差影响因素研究

发布时间：2018-02-20 00:57

本文关键词： 机床技术气浮直线运动平台 NURBS 几何误差定位误差误差补偿　出处：《哈尔滨工程大学学报》2015年08期 　论文类型：期刊论文

【摘要】：为实现气浮直线驱动平台定位误差的精确补偿,对气浮直线驱动平台定位误差的影响因素进行了研究。试验测量了气浮直线驱动平台的定位误差,发现其测量结果中包含有随机误差、时变的热误差以及与位置相关的几何误差。对定位误差进行补偿的前提是根据不同误差的性质准确地将其分离,否则就会存在少补或过补的现象。本文利用统计学的方法求出随机误差的数学期望,对测量数据的均值进行修正,消除随机误差对测量值的影响。进一步对修正后的均值进行多项式拟合,将位置相关的几何误差和时变的热误差分离,并发现时变的热误差对超精密气浮直线驱动平台的定位误差影响很显著,需要进行在线实时补偿。提出使用NURBS曲线插值的方法,建立位置相关的几何误差的预测模型,从而实现对位置相关的几何误差进行精确的预测和离线误差补偿。
[Abstract]:In order to accurately compensate the positioning error of the air-floated linear driving platform, the influence factors of the positioning error of the air-floated linear driving platform are studied, and the positioning error of the air-floated linear driving platform is measured experimentally. It is found that there are random errors, time-varying thermal errors and positional geometric errors in the measurement results. Otherwise, there will be little or too much compensation. In this paper, the mathematical expectation of random error is calculated by statistical method, and the mean value of measured data is corrected. The effect of random error on the measured value is eliminated. The modified mean value is further fitted by polynomial to separate the position dependent geometric error from the time-varying thermal error. It is found that the time-varying thermal error has a significant effect on the positioning error of the ultra-precision air-floated linear driving platform, which needs to be compensated in real time on line. The method of NURBS curve interpolation is used to establish the prediction model of the position related geometric error. Thus the position-related geometric error can be accurately predicted and the off-line error can be compensated.
【作者单位】：吉林大学机械科学与工程学院;
【基金】：国家973重点基础研究发展计划资助项目(2011CB706702)
【分类号】：TG502.3

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