金刚石覆镍量对固着磨料研磨蓝宝石性能的影响

发布时间：2018-02-22 07:36

本文关键词： 蓝宝石镀镍金刚石固结磨料研磨垫研磨性能　出处：《硅酸盐学报》2015年04期 　论文类型：期刊论文

【摘要】：金刚石磨粒表面镀镍可以增强其与树脂的结合力。通过化学镀的方法在金刚石磨粒表面镀覆一层不同包覆率的Ni-P合金层,并制成了固结磨料研磨垫。采用CP-4型CMP抛光和测试系统,分别对蓝宝石进行粗研和精研加工,探索不同覆镍量对固着磨料研磨蓝宝石性能的影响。结果表明:金刚石磨粒表面镀镍可以改变其微观形貌:在实验范围内,随着金刚石包覆率的增加,摩擦因数、材料去除率和表面粗糙度呈现先增大后减小的趋势,其中粗研在包覆率为50%、精研在包覆率30%达到峰值;声发射信号呈现先减小后增大的趋势,其中粗研在包覆率50%、精研在包覆率30%达到谷值;粗研过程对包覆率的要求高于精研过程。
[Abstract]:Nickel plating on diamond abrasive particles can enhance its adhesion to resin. A layer of Ni-P alloy with different coating rates is deposited on diamond abrasive particles by electroless plating. The CP-4 CMP polishing and testing system was used to grind and finish the sapphire, respectively. The effects of different amount of nickel coating on the properties of fixed abrasive sapphire grinding were investigated. The results show that nickel plating on the surface of diamond abrasive particles can change the microstructure of diamond abrasive particles: in the experimental range, the friction coefficient increases with the increase of diamond coating ratio. The material removal rate and surface roughness increased first and then decreased, in which the coarse-cladding rate was 50 and the cladding rate reached its peak value at 30%, the acoustic emission signal showed a tendency of decreasing first and then increasing. The coating rate is 50% for rough grinding and 30% for finishing rate, and the requirement for coating rate in rough grinding process is higher than that in intensive grinding process.
【作者单位】：南京航空航天大学机电学院;
【基金】：国家自然科学基金项目(51175260和51375237) 中央高校基本科研业务专项资金项目(NP2012506) 江苏高校优势学科建设工程项目
【分类号】：TQ164;TG73

【参考文献】