一种基于单转位特征角的圆度误差分离方法研究

发布时间：2018-02-27 02:32

本文关键词： 光学标准球圆度误差分离单转位谐波抑制无原理误差　出处：《光电子·激光》2015年12期 　论文类型：期刊论文

【摘要】：为提高光学标准球形状误差测量准确度,提出了一种基于单转位特征角的圆度误差分离方法。本文方法基于严格的数学原理,利用特征角在形状比较中参照作用,可完全回避开可能产生谐波抑制的所有"盲点";通过一次转位,并分别将转位前后的采样数据进行傅里叶变换,在频域中实现光学标准球圆度误差和主轴径向回转误差的分离,再将分离后的数据变换到时域,可以在使分离后的信号在进入滤波器之前无任何信号损失,使得建模过程无任何原理误差,实现主轴径向回转误差和光学标准器圆度误差的完全分离。实验表明,当每周采样点数为1 024、转位特征角为21.09′时,分离后圆度误差包含所有频次的谐波,无任何谐波抑制,表明光学标准球圆度误差与仪器主轴的回转误差得到严格分离。本文方法不仅可以用于超精密级光学标准球的圆度测量,而且可用于建立精度水平最高的理想的基/标准级圆度测量系统。
[Abstract]:In order to improve the accuracy of shape error measurement of optical standard sphere, a method of roundness error separation based on the characteristic angle of single transposition is proposed. This method is based on strict mathematical principle, and the characteristic angle is used as a reference in shape comparison. It can completely avoid all the "blind spots" that may produce harmonic suppression, and separate the optical standard spherical roundness error from the radial rotation error of spindle in frequency domain by single transposition and Fourier transform of sampling data before and after transposition, respectively. Then the separated data can be transformed into time domain without any signal loss before the separated signal enters the filter, so that there is no principle error in the modeling process. The complete separation of the radial rotation error of the spindle and the roundness error of the optical standard device is realized. The experimental results show that when the sampling point per week is 1 024 and the characteristic angle of the transposition is 21.09', the roundness error after separation contains harmonics of all frequencies without any harmonic suppression. It is shown that the roundness error of the optical standard sphere is strictly separated from the rotation error of the instrument spindle, and this method can not only be used to measure the roundness of the ultra-precision optical standard sphere. Moreover, it can be used to establish the ideal base / standard roundness measurement system with the highest accuracy level.
【作者单位】：哈尔滨工业大学超精密光电仪器工程研究所;
【基金】：国家自然科学基金(51105113) 哈工大科研创新基金(HIT.NSRIF.2013011)资助项目
【分类号】：TG834

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