内嵌式微球透镜的光纤飞秒激光加工技术及应用

发布时间：2018-02-28 15:29

本文关键词： 飞秒激光微加工内嵌微球透镜　出处：《北京工业大学学报》2015年12期 　论文类型：期刊论文

【摘要】：利用聚焦的高重复频率飞秒脉冲在聚甲基丙烯酸甲酯薄片内部制作了具有优良光学性能的微球凸透镜及微球凹透镜.微球凸透镜的加工原理是基于飞秒激光诱致折射率变化机制,而微球凹透镜的制作是基于多光子效应及高重频激光脉冲序列的热积累效应.以微球凹透镜为例,对比了不同聚焦条件下制作微球透镜的加工效率及效果,讨论了选择聚焦透镜所需综合考虑的因素.提出了采用本方法可针对特定的应用需求设计并精确制作微光学系统.最后,讨论了内嵌式微透镜在微流控器件中增强荧光信号收集能力与成像能力的潜在应用价值,以及单步制作功能集成的微流控芯片的可能性.
[Abstract]:Microsphere convex lens and microsphere concave lens with excellent optical properties have been fabricated by focusing high repetition frequency femtosecond pulse inside the polymethyl methacrylate wafer. The fabrication principle of microsphere convex lens is based on femtosecond laser induced by femtosecond laser. Refractive index variation mechanism, The fabrication of microsphere concave lens is based on the multi-photon effect and the thermal accumulation effect of high repetition frequency laser pulse sequence. Taking the microsphere concave lens as an example, the processing efficiency and effect of the microsphere lens under different focusing conditions are compared. The factors that need to be considered in selecting focusing lens are discussed. It is proposed that this method can be used to design and accurately fabricate micro optical system according to specific application requirements. Finally, The potential application value of embedded microlens in enhancing the ability of fluorescence signal collection and imaging in microfluidic devices and the possibility of one-step fabrication of integrated microfluidic chips are discussed.
【作者单位】：北京工业大学激光工程研究院;美国田纳西大学机械航空生物工程系;
【基金】：国家科技部基金资助项目(2011YQ030112) 北京市自然科学基金资助项目(4132017)
【分类号】：TH74;TG66

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