微小球最大横截面圆度测量系统研究

发布时间：2018-03-19 06:37

本文选题：圆度测量　切入点：微小球　出处：《合肥工业大学》2015年硕士论文　论文类型：学位论文

【摘要】：在微纳米测量领域,微小球经常被用来作为球形探针。传统的接触探头通常采用直径为几个毫米到0.3毫米范围的红宝石球或钢球,但是为了方便插入小的凹槽中测量凹槽壁等小工件,要求探球尽可能小。随着测球越来越小,不可能有很好的球度,所以,需要测量探球圆度和准确半径值。针对传统测头圆度的测量,本文提出新的方法,研制了微小球最大横截面圆度测量系统,基于迈克尔逊干涉原理研发圆度测量方案,提升测量分辨率可以达到纳米级,并且提出半径变化值的测量方案和误差分离方法。本文采用两点法测量,借助两个小的迈克尔逊激光干涉仪采用对径夹持的方法,可以直接测量微小球的直径。在转台带动待测球转动过程中,读取两干涉仪偏移读值,在测量直径时可以消除转轴偏差。研发的圆度测量系统分辨率可以达到lnm和精度10nm。本文测量了三个微小球的直径变化值,并都具有良好的重复性。该系统可实现数十微米至1mm直径范围内的小球直径和最大直径处圆度的高精度测量。圆度测量原则上受测量主轴的同心度误差的影响,为了精确测量必须对其进行补偿。在本文中,介绍了一种新的圆度分离方法,可以直接分离偏心误差,径向误差,包括径向运动误差和圆度误差。利用两个位移传感器采用直接测量的方法测量待测球,平均直径也可以同时被计算出来。实验结果验证了所提方法和研制的实验系统的有效性。
[Abstract]:In the field of micrometer, microspheres are often used as spherical probes. Traditional contact probes usually use ruby balls or steel balls in the range of several millimeters to 0.3 mm in diameter. But in order to easily insert into small grooves to measure small workpieces such as grooves, the ball is required to be as small as possible. As the ball becomes smaller and smaller, it is impossible to have a good sphericity, so, It is necessary to measure the roundness and the accurate radius of the probe. In this paper, a new method is proposed to measure the roundness of the traditional probe, and a system for measuring the maximum cross-section roundness of the microsphere is developed, and a roundness measurement scheme is developed based on the Michelson interference principle. The resolution of lifting measurement can reach nanometer level, and the measurement scheme of radius variation value and the method of error separation are put forward. In this paper, two points method is used to measure, and two small Michelson laser interferometers adopt the method of diameters clamping. The diameters of tiny balls can be measured directly. While the turntable drives the ball to be measured, the two interferometer offset readings are read. The rotary axis deviation can be eliminated in measuring diameters. The roundness measurement system developed can achieve lnm resolution and accuracy of 10nm. the diameter variation values of three microspheres are measured in this paper. The system can achieve high precision measurement of sphere diameter and maximum diameter roundness in the range of tens of micron to 1 mm diameter. The roundness measurement is affected by the concentric error of the measuring spindle in principle. In order to measure accurately it must be compensated. In this paper, a new roundness separation method is introduced, which can directly separate eccentric error and radial error. The radial motion error and roundness error are included. Using two displacement sensors to measure the ball to be measured directly, the mean diameter can be calculated simultaneously. The experimental results show that the proposed method and the developed experimental system are effective.
【学位授予单位】：合肥工业大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TG834

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