两自由度运动误差补偿装置的研制

发布时间：2018-03-23 13:06

本文选题：光学自由曲面　切入点：单点金刚石车削　出处：《吉林大学》2015年硕士论文

【摘要】：当前，基于快速刀具伺服(Fast Tool Servo, FTS)的单点金刚石车削技术已被普遍应用于加工各种复杂曲面，如光学自由曲面和微结构功能表面等，因而被国内外工程界及学术界认为一种具有发展潜力的机械加工技术。一般而言，数控机床运动精度直接决定了被加工表面的面形精度，尽管飞速发展的数控机床技术可以在一定程度上促进FTS车削技术的应用，但仍然难以满足光学复杂曲面纳米级的精度要求。基于此，本文利用一种两自由度的FTS装置对加工工程中的机床运动误差进行有效的补偿，提高被加工表面的面形精度，，并降低FTS金刚石车削技术对于数控机床的精度要求，这必将有效降低光学复杂曲面的制造程度并提高其加工效率。本文的主要研究内容主要包括如下几个方面： 1)设计了一种两自由度可变前角式的快速刀具伺服装置。压电驱动器和电容位移传感器的工作特性分析，并根据FTS装置的性能指标选取适当的型号；柔性铰链的结构设计与分析，包括柔性铰链结构参数的设计、刚度性能及强度性能参数的校核、输入输出位移的分析、动力学/静力学性能分析及金刚石刀具的选用等等。 2)两自由度FTS装置的柔度建模及有限元仿真；首先利用柔度矩阵法(Matrix-basedcompliance modeling, MCM)建立FTS装置的柔度矩阵模型，并利用ANSYS有限元分析元件对建立的MCM模型进行验证；其次基于Lagrange原理，建立该FTS装置的动力学模型及其固有频率对结构参数的依赖关系模型，并利用有限元分析结果与解析结果进行比较，其一致性表明所建立解析模型的有效性。 3)对两自由度FTS装置进行性能测试；在开环条件下测试所设计FTS装置的基本工作性能，如工作频率、运动分辨率、最大行程等性能参数；利用PMAC控制器建立FTS装置的两轴伺服控制系统，并通过阶跃响应测试建立系统闭环响应特征及刀具定位精度。
[Abstract]:At present, single point diamond turning technology based on fast cutting tool servo Fast Tool Servo (FTS) has been widely used to process various complex surfaces, such as optical free surface and microstructural functional surface, etc. Therefore, the engineering and academic circles at home and abroad consider a kind of machining technology with developing potential. Generally speaking, the motion accuracy of NC machine tools directly determines the surface shape accuracy of the machined surface. Although the rapid development of CNC machine tool technology can promote the application of FTS turning technology to a certain extent, it is still difficult to meet the precision requirements of optical complex surfaces at nanometer level. In this paper, a FTS device with two degrees of freedom is used to compensate the machine tool motion error effectively, to improve the surface shape accuracy of the machined surface, and to reduce the precision requirement of FTS diamond turning technology for NC machine tools. This will effectively reduce the manufacturing degree of optical complex surface and improve its processing efficiency. The main contents of this paper include the following aspects:. 1) A kind of fast cutter servo device with two degrees of freedom with variable front angle, piezoelectric actuator and capacitive displacement sensor is designed, and the appropriate model is selected according to the performance index of the FTS device; The structural design and analysis of the flexure hinge include the design of the structural parameters of the flexure hinge, the checking of the stiffness and strength performance parameters, the analysis of the input and output displacement, the dynamic / static performance analysis and the selection of diamond cutting tools, etc. 2) the flexibility modeling and finite element simulation of two-degree-of-freedom FTS device. Firstly, the compliance matrix model of FTS device is established by using the flexibility matrix method, and the MCM model is verified by ANSYS finite element analysis element. The dynamic model of the FTS device and the dependence of the natural frequency on the structural parameters are established. The results of finite element analysis are compared with the analytical results. The consistency of the proposed analytical model shows the validity of the established analytical model. 3) testing the performance of the two-degree-of-freedom FTS device, testing the basic performance of the designed FTS device under open-loop conditions, such as operating frequency, motion resolution, maximum stroke and other performance parameters. The two-axis servo control system of FTS device is established by using PMAC controller, and the closed-loop response characteristics and tool positioning accuracy are established by step response test.
【学位授予单位】：吉林大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TG659

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