大气压下纳秒脉冲弥散放电对铜的表面处理

发布时间：2018-04-05 14:04

本文选题：纳秒脉冲　切入点：弥散放电　出处：《高电压技术》2015年05期

【摘要】：纳秒脉冲弥散放电能够在大气压下产生高功率密度、高电子能量的低温等离子体。为了研究弥散放电等离子体在金属材料表面改性的作用,利用上升沿约150 ns、脉宽约300 ns的MPC-50D纳秒脉冲电源在大气压下(空气)管-板电极之间产生弥散放电,寻找最佳弥散放电参数,并对金属Cu表面进行了弥散处理。研究结果表明:随着重复频率的增加,弥散放电增强,瞬时功率增大,沉积能量增多。当施加电压为31 kV,重复频率为800 Hz,间隙距离为3 cm时,得到最佳的弥散放电效果。此外,采用发射光谱检测到空气中弥散放电中N2(C→B,0-0)的第二正带系和N2+(B→X,0-0)的第一负带系。采用大气压弥散放电等离子体对金属Cu表面处理的结果显示处理后的Cu表面出现孔径约0.5μm的熔孔;Cu的亲水性及表面能有明显提高,在处理90 s后趋于饱和。显微硬度测量结果表明,表层硬度在等离子体处理时间480 s后提高约26.5%。
[Abstract]:Nanosecond pulse dispersion discharge can produce a low temperature plasma with high power density and high electron energy at atmospheric pressure.In order to study the effect of dispersion discharge plasma on the surface modification of metal materials, a MPC-50D nanosecond pulse power supply with a rising edge of about 150ns and a pulse width of 300ns was used to generate a dispersion discharge between the tube and plate electrodes at atmospheric pressure.The optimum parameters of dispersion discharge were found and the Cu surface was treated by dispersion treatment.The results show that with the increase of repetition rate, the dispersion discharge increases, the instantaneous power increases and the deposition energy increases.When the applied voltage is 31 kV, the repetition rate is 800 Hz and the gap distance is 3 cm, the best dispersion discharge effect is obtained.In addition, the second positive band system and the first negative band system of N _ 2 ~ (C ~ (+) B _ (0)) and N _ 2 ~ (B ~ ((+)) _ (X _ (0))) in dispersion discharge in air were detected by emission spectra.The results of surface treatment of Cu by atmospheric pressure dispersion discharge plasma show that the surface hydrophilicity and surface energy of melting-hole Cu with pore diameter about 0.5 渭 m after treatment are obviously improved, and the surface energy tends to be saturated after 90 s treatment.The results of microhardness measurement show that the surface hardness is increased by about 26.5 after the plasma treatment for 480 s.
【作者单位】：中国科学院电工研究所;中国科学院电力电子与电气驱动重点实验室;南京工业大学自动化与电气工程学院;
【基金】：国家自然科学基金(51222701;51207154) 国家重点基础研究发展计划(973计划)(2014CB239505-3)~~
【分类号】：TG178

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