轴向磁场对电弧离子镀TiN薄膜组织结构及力学性能的影响

发布时间：2018-04-24 20:05

本文选题：电弧离子镀 + 轴向磁场　；参考：《中国表面工程》2015年01期

【摘要】：为了研究轴向磁场对薄膜结构及力学性能的影响规律,采用电弧离子镀方法在高速钢基体上沉积了TiN薄膜,利用X射线衍射仪(XRD)、扫描电子显微镜(SEM)、轮廓仪和纳米压痕仪考察了外加轴向磁场对薄膜化学成分、组织结构、硬度及弹性模量的影响。结果表明:外加轴向磁场对TiN薄膜的组织结构及力学性能有明显影响。磁场强度越高,薄膜表面颗粒及溅射坑越大,薄膜表面粗糙度增大;薄膜中N含量随着磁场强度增加而增大,而Ti含量则显示出相反的趋势;磁场对薄膜择优取向有明显影响,随着磁场强度增加,薄膜(111)取向增强,而后逐渐转变为(220)择优;薄膜硬度和弹性模量随着磁场强度增加先增加而后降低,在磁场强度为50Gs时分别达到最大值28.4GPa与415.4GPa。
[Abstract]:In order to study the effect of axial magnetic field on the structure and mechanical properties of the films, TiN thin films were deposited on high speed steel substrates by arc ion plating. The effects of axial magnetic field on the chemical composition, microstructure, hardness and elastic modulus of the films were investigated by means of X-ray diffractometer, scanning electron microscope (SEM), scanning electron microscopy (SEM) and nano-indentation apparatus. The results show that the axial magnetic field has a significant effect on the microstructure and mechanical properties of TiN films. The higher the magnetic field intensity is, the larger the surface particles and sputtering pits are, and the surface roughness increases, the N content in the film increases with the increase of the magnetic field intensity, while the Ti content shows the opposite trend, and the magnetic field has an obvious effect on the preferred orientation of the film. With the increase of the magnetic field intensity, the orientation of the film increases and the film gradually changes to the preferred one, and the hardness and elastic modulus of the film increase first and then decrease with the increase of the magnetic field intensity, reaching the maximum values of 28.4GPa and 415.4GParespectively when the magnetic field intensity is 50Gs.
【作者单位】：中国科学院金属研究所专用材料与器件研究部;中国科学院金属研究所材料表面工程研究部;
【基金】：国家自然科学基金(51171197)
【分类号】：TG174.4

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