金刚石飞切机床空气静压主轴系统动态特性

发布时间：2018-05-09 02:24

  本文选题：空气静压主轴 + 动态特性　； 参考：《中国工程物理研究院》2015年硕士论文

【摘要】：金刚石飞切(Diamond Flying Cutting, DFC)机床是实现大口径平面类光学元件超精密加工的关键装备,在国防和民用尖端产品(如精确制导、夜视、热成像瞄准系统、强激光武器)的加工中得到了广泛应用。空气静压主轴是DFC机床实现回转运动的核心。实际切削时,来自切削过程、DFC机床传动系统以及机床外界的各种扰动力将作用在DFC机床的空气静压主轴系统上,致使刀具与工件间产生相对位移,改变了它们之间的正确位置关系,并在加工表面上留下振纹,从而降低了被加工零件的表面质量。因此,研究空气静压主轴系统的动态特性,识别空气静压主轴系统抗振的薄弱环节,并优化改进,对提高其空气静压主轴系统的抗振性能和DFC机床加工稳定性具有重要意义,为此本文主要开展了如下工作：(1)建立了空气静压主轴动态特性理论模型,基于集中质量模型给出了主轴系统的动力学方程,为系统开展主轴动态特性研究奠定了基础。(2)基于结合面动态特性理论,开展了空气静压主轴典型结合面的动态特性分析与实验研究,获得了主轴气膜结合面和螺栓结合面的动态特性参数及其变化规律。(3)采用数值仿真与模态实验相结合的方法,建立了空气静压主轴系统的动态特性模型。在此基础上,研究了主轴系统的动态特性参数及其变化规律。(4)结合金刚石飞切工艺实验,采用特征频率辨识的方法,初步建立了空气静压主轴系统动态特性与金刚石飞切工件表面部分波段波纹误差的对应关系,识别了空气静压主轴系统内的薄弱环节,并提出了相应的优化改善措施,最后通过金刚石飞切实验验证了优化措施的有效性。通过以上的研究工作,本研究最终建立了包含结合面的DFC机床空气静压主轴系统动态模型,获得了主轴动态特性参数及其变化规律,揭示了主轴动态特性与金刚石飞切表面波纹误差的对应关系,最终通过对主轴薄弱环节的优化,使PSD1频段(2.5mm≤L≤33mm)内的金刚石飞切表面波纹误差RMS值从53nm降低至12nm,验证了本文研究方法和结论的正确性。
[Abstract]:Diamond Flying cutting machine tool is the key equipment to realize ultra-precision machining of large-caliber planar optical components. It is used in advanced products such as precision guidance, night vision, thermal imaging aiming system, and so on, in national defense and civil advanced products, such as precision guidance, night vision, thermal imaging aiming system, etc. High-power laser weapon) has been widely used in processing. The air static spindle is the core of DFC machine tool. In actual cutting, the driving system of the DFC machine tool and the external disturbance force will act on the air static spindle system of the DFC machine tool, resulting in the relative displacement between the cutting tool and the workpiece. The correct position relation between them is changed, and the vibration is left on the machined surface, which reduces the surface quality of the machined parts. Therefore, it is of great significance to study the dynamic characteristics of air static spindle system, identify the weak links of vibration resistance of air static spindle system, and optimize the improvement to improve the anti-vibration performance of air static spindle system and the machining stability of DFC machine tool. The main work of this paper is as follows: (1) A theoretical model of the dynamic characteristics of the air static spindle is established, and the dynamic equation of the spindle system is given based on the lumped mass model. Based on the theory of dynamic characteristics of the interface, the dynamic characteristic analysis and experimental study of the typical joint surface of the aerostatic spindle are carried out. The dynamic characteristic parameters and their variation law of the air film bonding surface and the bolt joint surface are obtained. The dynamic characteristic model of the air static pressure spindle system is established by combining the numerical simulation with the modal experiment. On the basis of this, the dynamic characteristic parameters of the spindle system and its variation law are studied. Combined with the experiment of diamond flying cutting process, the method of characteristic frequency identification is adopted. The relationship between the dynamic characteristics of the aerostatic spindle system and the waveband corrugation error on the surface of the diamond flying cutting workpiece is preliminarily established, the weak links in the air static spindle system are identified, and the corresponding optimization and improvement measures are put forward. Finally, the effectiveness of the optimization measures is verified by diamond flying cutting experiments. Through the above research work, the dynamic model of air static spindle system of DFC machine tool including joint surface is established, and the dynamic characteristic parameters of spindle and its variation law are obtained. The relationship between the dynamic characteristics of the spindle and the corrugation error of the diamond flying cutting surface is revealed. Finally, the weak links of the spindle are optimized. The corrugation error (RMS) of diamond flying cutting surface in PSD1 band (2.5mm 鈮，

本文编号：1864156