脉冲偏压对304不锈钢表面多弧离子镀CrAlN薄膜结构和耐蚀性能的影响

发布时间：2018-05-20 18:37

本文选题：CrAlN薄膜 + 多弧离子镀　；参考：《材料保护》2015年10期

【摘要】：目前,鲜见有关脉冲偏压对多弧离子镀Cr Al N薄膜耐蚀性能影响的报道。以不同的脉冲偏压在304不锈钢表面多弧离子镀Cr Al N薄膜。采用扫描电镜、显微镜、X射线衍射仪、硬度仪、粗糙度仪分析了Cr Al N薄膜的表面形貌、相结构、硬度、表面粗糙度及耐蚀性能,分析了脉冲偏压对相关性能的影响。结果表明:随着脉冲偏压幅值的增大,Cr Al N薄膜表面大颗粒及凹坑尺寸和数量减少,薄膜质量提高;Cr Al N薄膜主要由(Cr,Al)N相组成,随着偏压增加,Cr Al N薄膜出现(220)择优取向;Cr Al N薄膜表面粗糙度随脉冲偏压增大而减小,显微硬度随脉冲偏压的增大而增大;Cr Al N薄膜在3.5%Na Cl溶液中的耐蚀性随着脉冲偏压的增大而增大,脉冲偏压为400 V时,Cr Al N薄膜与基体304不锈钢的腐蚀速率之比为0.34,薄膜的综合性能最好。
[Abstract]:At present, there are few reports about the effect of pulse bias on the corrosion resistance of multi-arc ion plating Cr Al N films. Cr Al N thin films were deposited on 304 stainless steel by multi-arc ion plating with different pulse bias voltage. The surface morphology, phase structure, hardness, surface roughness and corrosion resistance of Cr Al N thin films were analyzed by means of scanning electron microscope, microscope X-ray diffractometer, hardness tester and roughness instrument. The results show that with the increase of pulse bias amplitude, the size and number of large particles and pits on the surface of Cr Al N films decrease, and the improvement of the film quality is mainly composed of CrAlN phase. With the increase of bias voltage, the surface roughness of Cr Al N films decreases with the increase of pulse bias. The corrosion resistance of Cr Al N films in 3.5%Na Cl solution increases with the increase of pulse bias voltage. When the pulse bias voltage is 400 V, the ratio of corrosion rate of Cr Al N film to 304 stainless steel substrate is 0.34, and the comprehensive properties of the film are the best.
【作者单位】：辽宁工程技术大学材料科学与工程学院;
【分类号】：TG174.44

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