金刚石刀具的圆柱母光栅微加工基础研究

发布时间：2018-06-05 03:13

本文选题：微纳制造 + 聚焦离子束　；参考：《天津大学学报(自然科学与工程技术版)》2015年05期

【摘要】：精密长光栅作为高档数控机床中的核心部件,其制造能力和精度直接影响着数控机床的制造水平.针对纳米滚压印技术制备长光栅中的核心部件即圆柱母光栅的制造开展了深入研究,探讨了母光栅刻划用金刚石刀具的聚焦离子束(FIB)制备技术,以及微刻划过程中切削参数对圆柱母光栅加工质量的影响规律.研究发现,聚焦离子束加工单晶金刚石材料时会存在沟道效应,影响所制备的金刚石刀具及其加工母光栅的形状精度.从改善离子束束流分布的均匀性、FIB加工参数优化等角度建立了有效克服FIB加工沟道效应的方法.通过DEFORM有限元模拟实验和超精密母光栅刻划实验,优化金刚石刀具刀尖角和微刻划加工速度,研究了抑制母光栅加工中微尺度毛刺的有效方法,最终获得了高精度母光栅刻划结果.
[Abstract]:As the core component of high grade CNC machine tools, the precision long grating is the key part of the CNC machine tool. Its manufacturing capability and accuracy have a direct influence on the manufacturing level of CNC machine tools. The manufacturing of the core component of the long grating, namely the cylindrical grating, is deeply studied. The focus ion beam (FIB) of the diamond cutting tool is discussed. The effect of the cutting parameters on the processing quality of the cylindrical gratings in the process of micro characterization. It is found that the channel effect exists in the processing of single crystal diamond with focused ion beam, which affects the shape precision of the prepared diamond tools and their processing mother gratings. The FIB processing is made from improving the uniformity of the ion beam beam distribution. The method of effectively overcoming the FIB channel effect is established by the parameter optimization. Through the DEFORM finite element simulation experiment and the ultra precision mother grating calibration experiment, the cutting edge angle and the micro machining speed of the diamond cutter are optimized, and the effective method to suppress the microscale burr in the processing of the mother grating is studied, and the high-precision grating characterization is finally obtained. Result.
【作者单位】：天津大学精密测试技术及仪器国家重点实验室;天津市微纳制造技术工程中心;
【基金】：国家重点基础研究发展计划(973计划)资助项目(2011CB706700) 国家自然科学基金资助项目(51275559,50935001) 中物院超精密加工技术重点实验室开放基金资助项目(KF13008)
【分类号】：TG71;TG659

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