磨削阶段大口径非球面拼接测量技术

发布时间：2018-07-03 07:19

本文选题：大口径非球面 + 拼接测量　；参考：《机械工程学报》2015年04期

【摘要】：为实现对磨削加工阶段大口径非球面光学元件的精密测量,提出一种基于坐标测量的多段拼接综合优化数据处理模型。基于多体系统理论、最小二乘原理建立两段面形轮廓拼接数学模型;提出基于曲率原理和非球面方程最小二乘拟合的冗余数据剔除数学模型;建立多段拼接的综合优化处理模型;利用Taylor Hobson轮廓仪对口径为176 mm的非轴对称非球面光学元件的3条母线进行分段测量试验并通过文中提出的数学模型进行数据拼接处理,试验结果表明,拼接测量结果与单次测量结果相比,误差最大值的平均值为0.25μm,最小值的平均值为 0.22μm,比该光学元件的面形峰-谷值2.77μm高出一个数量级,达到检测要求。试验结果证明所提多段拼接综合优化数据处理模型的正确性及有效性,该模型可以进行工程应用。
[Abstract]:In order to realize the precision measurement of large aperture aspheric optical elements in grinding process, a multi-segment integrated optimal data processing model based on coordinate measurement is proposed. Based on the theory of multi-body system and the principle of least squares, the mathematical model of two-segment contour splicing is established, and the mathematical model of redundant data elimination based on curvature principle and least square fitting of aspherical equation is proposed. The comprehensive optimal processing model of multi-segment splicing is established, and the data splicing is processed by using Taylor Hobson profilometer to measure three busbars of axially asymmetric aspheric optical elements with a diameter of 176mm. The experimental results show that the average error of the maximum error is 0.25 渭 m and the minimum is 0.22 渭 m, which is one order of magnitude higher than that of the surface peak and valley value of the optical element 2.77 渭 m. The experimental results show that the proposed model is correct and effective, and the model can be applied in engineering.
【作者单位】：厦门大学机电工程系;
【基金】：国家自然科学基金资助项目(51075343,51275433)
【分类号】：TG806

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