超精密圆柱度误差测量方法研究

发布时间：2018-07-29 12:51

【摘要】：圆柱类零件是各种机器设备的基础部件,也是组成各种回转运动副的必要元件,其表面的形状误差,对配合精度及性质产生极大的影响,对控制回转运动过程的振动、噪声以及回转运动副间的润滑、密封效果有着重要意义。圆柱度误差是圆柱类零件形状精度的一项综合评定指标,反映了被测圆柱面要素相对于理想圆柱面的变动量。简易、实用、经济、高精度、高效率的圆柱度误差测量方法一直是国内外学者研究的热点。作者查阅了大量文献资料,分析了国内外现行圆柱度误差测量方法,根据圆柱度误差评定标准以及电容传感器的基本理论,提出了圆柱度误差测量的电容形面传感法,该方法利用采样面的方式对圆柱类零件进行测量,通过一次采样就能获取被测面的全部信息,从而实现圆柱度误差的快速、高精度、非接触式测量,弥补了现有通过采样点取样进行测量的弊端。本文首先研究推导了多导体系统部分电容的求解过程及性质,并运用ANSYS软件对三维实体模型的多导体系统部分电容进行提取,通过对提取的电容结果的对比分析,验证了电容形面传感法测量原理的准确性,同时也说明了电容形面传感方法的可行性。最后,依据电容形面传感法测量原理设计了电容式测量头,对设计的电容式测量头进行模拟实验,通过对实验结果和电场分布情况分析,表明所设计的电容式测量头能够极大减小边缘效应和外界干扰对测量结果的影响,并对电容式测量头结构的尺寸参数进行了优化,找到了各个尺寸参数因素对测量结果影响的主次关系和最优水平组合。针对某公司生产零件的圆柱度误差不能大于0.002mm的要求,以电容形面传感法的基本理论为基础,对测量装置机械结构进行了整体设计。
[Abstract]:Cylindrical parts are the basic parts of all kinds of machines and equipments, and they are also the necessary components to form various rotary motion pairs. The surface shape errors of cylindrical parts have a great influence on the matching accuracy and properties, and control the vibration of the rotary motion process. Noise and lubrication between rotary motion pairs, sealing effect has important significance. Cylindricity error is a comprehensive evaluation index for the shape accuracy of cylindrical parts, which reflects the variation of the measured cylinder surface relative to the ideal cylindrical surface. Simple, practical, economical, high precision and high efficiency cylindrical error measurement method has been a hot spot of domestic and foreign scholars. The author consulted a lot of literature and analyzed the current measurement methods of Cylindricity error at home and abroad. According to the evaluation standard of Cylindricity error and the basic theory of capacitive sensor, the method of measuring Cylindricity error by capacitive shape surface sensor was put forward. In this method, the cylindrical parts are measured by sampling surface, and all the information of the measured plane can be obtained by one sampling, so that the cylindrical error can be measured quickly, with high accuracy and without contact. It makes up for the shortcoming of sampling point sampling. This paper first studies and deduces the solution process and properties of partial capacitance of multi-conductor system, and uses ANSYS software to extract part capacitance of multi-conductor system based on three-dimensional solid model. The accuracy of the measurement principle of capacitive shape surface sensing method is verified, and the feasibility of the capacitance shape surface sensing method is also explained. Finally, the capacitive measuring head is designed according to the measuring principle of capacitive sensor. The simulation experiment of the designed capacitance measuring head is carried out, and the results of the experiment and the distribution of electric field are analyzed. The results show that the designed capacitive measuring head can greatly reduce the influence of edge effect and external interference on the measurement results, and optimize the dimension parameters of the capacitance measuring head structure. The primary and secondary relationships and the optimal horizontal combination of the influence of each dimension parameter on the measurement results are found. In view of the requirement that the cylinder error of parts produced by a company can not be greater than that of 0.002mm, based on the basic theory of capacitive shape surface sensing method, the mechanical structure of measuring device is designed as a whole.
【学位授予单位】：长春工业大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TG835

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