按需有机气相喷印沉积成膜系统的设计

发布时间：2018-10-22 14:31

【摘要】：提出了一种按需有机气相喷印沉积成膜技术,以惰性气体为载气,携带高温有机蒸汽经由图形化喷嘴喷射,在基板上冷却沉积成形.以AlQ3为有机原料,使用单孔硅喷嘴研究了喷嘴直径、蒸发腔温度、基板温度、载气驱动压力、基板与喷嘴间距、电磁阀开启时间和基板扫描速度等控制参数对喷印图形尺寸的影响,同时进行了单孔喷嘴图形阵列沉积和阵列喷嘴的直接并行沉积实验.实验结果表明:该按需有机气相喷印沉积成膜系统可实现有机材料的精密图形化沉积.
[Abstract]:A film forming technique based on on-demand organic vapor spray deposition is proposed, which takes inert gas as carrier gas, carries high temperature organic vapor through graphical nozzle jet, and cools deposition on substrate. Using AlQ3 as organic raw material, the diameter of nozzle, the temperature of evaporation chamber, the temperature of substrate, the driving pressure of carrier gas, the distance between substrate and nozzle were studied by using single hole silicon nozzle. The effect of the control parameters such as the opening time of solenoid valve and the scanning speed of substrate on the size of the spray printing pattern was studied. The experiments of single hole nozzle pattern array deposition and direct parallel deposition of array nozzle were carried out at the same time. The experimental results show that the film forming system can realize the precise graphical deposition of organic materials.
【作者单位】：华中科技大学机械科学与工程学院;
【基金】：国家自然科学基金资助项目(61108043,51175204) 高等学校博士学科点专项科研基金资助项目(20120142130011)
【分类号】：TG173

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