退火工艺对二氧化钛薄膜光催化性能的影响
发布时间：2018-10-30 08:25
【摘要】：利用磁控溅射法制备得到二氧化钛薄膜,将薄膜在高温管式炉中分别进行退火,利用XRD、AFM和紫外-可见光谱仪研究了不同温度下退火前后薄膜的晶相结构、光学性能和光催化性能。结果表明,随着退火温度的升高二氧化钛的晶相由锐钛矿向金红石转变,600℃时为两相共存,表面颗粒大小也会有相应变化,锐钛矿相表现出了更好的光催化性能。
[Abstract]:Titanium dioxide thin films were prepared by magnetron sputtering. The films were annealed in a high temperature tube furnace respectively. The crystal phase structure of the films before and after annealing at different temperatures was studied by XRD,AFM and UV-Vis spectrometer. Optical properties and photocatalytic properties. The results show that the crystalline phase of TIO _ 2 changes from anatase to rutile with the increase of annealing temperature, the two phases coexist at 600 鈩，
本文编号：2299471
[Abstract]:Titanium dioxide thin films were prepared by magnetron sputtering. The films were annealed in a high temperature tube furnace respectively. The crystal phase structure of the films before and after annealing at different temperatures was studied by XRD,AFM and UV-Vis spectrometer. Optical properties and photocatalytic properties. The results show that the crystalline phase of TIO _ 2 changes from anatase to rutile with the increase of annealing temperature, the two phases coexist at 600 鈩，
本文编号：2299471
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