超精密光学磨床减小热误差的结构优化

发布时间：2019-03-08 12:31

【摘要】：热变形是影响超精密机床精度的关键因素之一,而热导率是分析机床热变形准确度的决定性因素。为了保证机床温度场分布分析的准确性,提高机床的精度,提出一种基于热力学理论的热导率分析模型以及结合有限元分析的机床结构优化方法。建立自由电子气模型以及Debye模型,分别计算出自主设计的超精密光学磨床所采用的几种材料的热导率,提高热导率的准确性;进而利用有限元软件ANSYS分析机床主轴、溜板箱和床身的温度场分布;研究分析不同机床结构下主轴和机床整体的温升规律,提出基于热力学分析结果的一系列超精密光学磨床结构优化方法,针对误差敏感方向,采取对电动机与溜板箱的连接件以及电动机和主轴的接触件进行优化设计,减小热源与主轴、箱体之间的接触面积等方法,使机床热变形减小,提高了机床的精度。
[Abstract]:Thermal deformation is one of the key factors affecting the precision of ultra-precision machine tool, and thermal conductivity is the decisive factor to analyze the accuracy of thermal deformation of machine tool. In order to ensure the accuracy of temperature distribution analysis and improve the accuracy of machine tool, a thermal conductivity analysis model based on thermodynamic theory and a structural optimization method based on finite element analysis are proposed. The free electron gas model and Debye model are established to calculate the thermal conductivity of several materials used in the self-designed ultra-precision optical grinder, and to improve the accuracy of thermal conductivity. Then the finite element software ANSYS is used to analyze the temperature field distribution of machine tool spindle, chute box and bed. The law of temperature rise of spindle and whole machine tool under different machine tool structures is studied and analyzed. A series of optimization methods of ultra-precision optical grinder structure based on thermodynamic analysis results are put forward, aiming at the error sensitive direction. The thermal deformation of the machine tool is reduced and the precision of the machine tool is improved by optimizing the connecting parts between the motor and the chute box and the contact parts between the motor and the spindle, and by reducing the contact area between the heat source and the spindle and the box body.
【作者单位】：上海交通大学机械系统与振动国家重点实验室;上海交通大学机器人研究所;
【基金】：国家重点基础研究发展计划资助项目(973计划,2011CB013203)
【分类号】：TG580.2

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