高功率调制脉冲磁控溅射沉积TiAlSiN纳米复合涂层结构调控与性能研究

发布时间：2019-03-31 13:44

【摘要】：采用高功率调制脉冲磁控溅射Al/(Al+Ti)原子比(x)分别为0.25、0.5和0.67的TiAlSi合金靶,溅射功率1~4kW,氮气分压25%,工作气压0.3Pa,在Si(100)和AISI304奥氏体不锈钢基片上沉积了TiAlSiN纳米复合涂层。TiAlSiN涂层中氮含量保持在52.0at%~56.7at%之间,均形成了nc-TiAlN/a-Si3N4/AlN纳米晶/非晶复合结构。随着原子比x增加,非晶含量增加,涂层硬度先升高而后降低。当x=0.5时,硬度最高可达28.7GPa。溅射功率升高可提高溅射等离子体中金属离化程度,促进涂层调幅分解的进行,形成了界面清晰的非晶包裹纳米晶结构,且晶粒尺寸基本保持不变。当x=0.67时,溅射功率由1kW上升到4kW时,硬度由16.4GPa升至21.3GPa。不同靶材成分和溅射功率条件下沉积的TiAlSiN涂层的磨损率为(0.13~6.25)×10-5mm3/(N·m),具有优良的耐磨性能。当x=0.67,溅射功率2kW时,nc-TiAlN/a-Si3N4纳米复合涂层具有最优的耐磨性能。
[Abstract]:The Al/ (Al Ti) atomic ratio of 0.25,0.5 and 0.67 TiAlSi alloy targets with high power modulation pulse magnetron sputtering is 0.25,0.5 and 0.67, respectively. The sputtering power is 1kW, the partial pressure of nitrogen is 25%, the working pressure is 0.3Pa. TiAlSiN nano-composite coatings were deposited on Si (100) and AISI304 austenitic stainless steel substrates. The content of nitrogen in TiAlSiN coating was kept between 52.0 at% and 56.7 at%, which resulted in the formation of nc-TiAlN/a-Si3N4/AlN nanocrystalline / amorphous composite structure. With the increase of atomic ratio x, the amorphous content increases, and the hardness of the coating increases first and then decreases. When xx0.5, the hardness can reach 28.7GPa. The increase of sputtering power can increase the degree of metal dissociation in sputtering plasma and promote the decomposition of the coating in amplitude modulation. The amorphous coated nanocrystalline structure with clear interface is formed and the grain size remains basically unchanged. When the sputtering power increases from 1kW to 4kW, the hardness increases from 16.4GPa to 21.3 GPA. The wear rate of TiAlSiN coating deposited under different target composition and sputtering power is (0.13 脳 6.25) 脳 10-5mm3/ (N 路m),) with excellent wear resistance. When x = 0.67, sputtering power 2kW, the nc-TiAlN/a-Si3N4 nano-composite coating has the best wear resistance.
【作者单位】：大连理工大学材料科学与工程学院表面工程实验室;湖南农业大学工学院南方粮油作物协同创新中心;
【基金】：国家自然科学基金(51102032);国家自然科学基金创新群体(51321004)~~
【分类号】：TG174.4

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