超精密角位移测量与智能控制技术的研究

发布时间：2019-04-13 11:55

【摘要】：精密角度定位技术是整合了机械、电子、光学及智能控制于一体的复合控制技术,广泛应用于精密角位移测量与控制场合,如集成电路中硅片平面度的检测、精密导轨的直线度检测等。本文主要研究利用激光莫尔信号实现精密角位移测量与控制的方法及关键技术,主要包含了以下几个方面：研究了两级光栅衍射所产生的莫尔信号的角位移特性,建立了莫尔信号光强与角位移测量的数学模型。通过计算机仿真对建立的数学模型进行了研究。仿真结果表明,两级光栅衍射后的莫尔信号强度会随着光栅间距变化呈周期性变化,当光栅间距为P2/λ的整数倍时,莫尔信号幅度变化最大,同时莫尔信号强度也随两片光栅的相对角位移呈周期性变化。在建立了莫尔信号角位移测量模型的基础上,设计了宏微复合式驱动定位系统。宏位移机构以步进电机为核心,以精密丝杠为传动机构,根据光栅检测到的位移信号及工控机发出的脉冲指令,完成精度为±5μrad的初始定位；微位移机构以压电陶瓷为核心,以柔性铰链为传动机构,根据角位移检测信号的大小,发出相应驱动电压,驱动压电致动器发生形变,从而带动传动机构完成微小角度的调整,最终实现高精度、大行程的精密角位移测量和控制,角位移精度可达±100nrad。在精密角度定位过程中,由于压电陶瓷存在着非线性缺陷,为了提高精密角度定位的精度和稳定性,本文对压电陶瓷的输入输出特性进行了实验分析,并应用神经网络技术模拟压电陶瓷的输入输出,减小压电陶瓷非线性对精密角位移测量与控制的影响,有效的提高了角位移测量的精度和速度。
[Abstract]:Precision angle positioning technology is a composite control technology which integrates mechanical, electronic, optical and intelligent control. It is widely used in precision angular displacement measurement and control applications, such as silicon wafer flatness detection in integrated circuits. Precision guideway straightness test, etc. This paper mainly studies the method and key technology of realizing precise angular displacement measurement and control by using laser moire signal. It mainly includes the following aspects: the angular displacement characteristic of moire signal produced by two-stage grating diffraction is studied. The mathematical model of moire signal intensity and angular displacement measurement is established. The mathematical model is studied by computer simulation. The simulation results show that the moire signal intensity after diffraction of the two-stage grating varies periodically with the grating spacing, and when the grating spacing is an integer multiple of P _ 2 / 位, the magnitude of the moire signal is the largest. At the same time, the moire signal intensity also changes periodically with the relative angular displacement of the two gratings. Based on the moire signal angular displacement measurement model, a macro-micro composite drive positioning system is designed. The macro displacement mechanism takes the stepping motor as the core and the precision screw as the transmission mechanism. According to the displacement signal detected by the grating and the pulse instruction from the industrial control computer, the initial positioning accuracy of 卤5 渭 rad is completed. The micro-displacement mechanism takes piezoelectric ceramic as the core and flexure hinge as the transmission mechanism. According to the magnitude of the angular displacement signal, the micro-displacement mechanism sends out the corresponding driving voltage and drives the piezoelectric actuator to deform, thus driving the drive mechanism to complete the adjustment of the micro-angle. Finally, the precision angular displacement measurement and control of high precision and large stroke can be achieved, and the angular displacement precision can reach 卤100 nrad. In order to improve precision angle positioning accuracy and stability, the input and output characteristics of piezoelectric ceramics are analyzed experimentally in order to improve the precision and stability of piezoelectric ceramics due to the nonlinear defects of piezoelectric ceramics in the process of precision angle positioning. The neural network technology is used to simulate the input and output of piezoelectric ceramics to reduce the influence of nonlinearity of piezoelectric ceramics on precision angular displacement measurement and control. The precision and speed of angular displacement measurement are improved effectively.
【学位授予单位】：南京师范大学
【学位级别】：硕士
【学位授予年份】：2015
【分类号】：TG82

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