工艺参数对CrNx涂层性能的影响

发布时间：2019-05-22 01:13

【摘要】：采用直流磁控溅射技术制备了氮化铬(CrNx)涂层,研究了制备CrNx涂层的工艺参数对所制备的CrNx涂层的膜基结合力及力学性能的影响。研究结果表明:工艺参数对CrNx涂层性能的影响不成各向同性关系;在较低的N_2含量、较高的脉冲偏压、约100V的直流偏压、较高的真空度、较高的沉积温度和较高的靶功率下制备的CrNx涂层的硬度较高,而在较低的N_2含量、恰当的脉冲偏压和占空比配对、较高的直流偏压、较高的真空度、较高的沉积温度和较高的靶功率下制备的CrNx涂层的表面形貌较好。
[Abstract]:Chromium nitride (CrNx) coating was prepared by DC magnetron sputter. The effect of process parameters on the adhesion and mechanical properties of CrNx coating was studied. The results show that the effect of process parameters on the properties of CrNx coating is not isotropic. The CrNx coatings prepared at lower N 鈮，

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