氧化锡气敏薄膜的喷墨打印技术研究

发布时间：2018-03-31 03:10

  本文选题：喷墨打印　切入点：气体传感器　出处：《传感技术学报》2017年04期

【摘要】：喷墨打印技术具有无需掩膜图形化、室温加工、方便操作等优点。利用喷墨打印技术在微热板上打印SnO_2多孔薄膜。根据打印机的定位精度和微热板的悬空尺寸设计了打印图形,根据目标厚度确定打印层数,以及打印后的干燥工艺参数;通过扫描电镜对薄膜结构进行微观表征,敏感薄膜表面平整,成膜均匀;最后对其进行气敏测试,当微热板工作在250℃时,打印的SnO_2气敏薄膜对乙醇有良好的响应,检测到最低乙醇浓度为0.5×10~(-6),响应和恢复时间均在3 s左右。
[Abstract]:The ink jet printing technology has the advantages of no mask graphics, room temperature processing, easy operation and so on. The printing pattern is designed according to the positioning accuracy of printer and the hanging size of micro hot plate, using inkjet printing technology to print SnO_2 porous film on the micro hot plate. According to the target thickness, the number of printing layers and the drying process parameters after printing are determined. The microstructure of the film is characterized by scanning electron microscope. The surface of the sensitive film is flat and the film is even. Finally, the gas sensing test is carried out. When the micro-hot plate is working at 250 鈩，

本文编号：1688870