基于铁酸铋薄膜异质结的信息存储器件研究
发布时间:2018-04-20 22:24
本文选题:铁酸铋薄膜 + 异质结构 ; 参考:《国防科学技术大学》2014年硕士论文
【摘要】:多铁材料铁酸铋(BiFeO_3)具有明显的双折射色散性质,薄膜异质结构的低维复合特性使其光物理性质更加丰富,因此研究BiFeO_3薄膜及其异质结构的电光效应并探索其在信息存储器件方面的应用具有重要意义。本文主要研究了BiFeO_3薄膜及其异质结构的电光效应,设计了一种基于BiFeO_3/Au薄膜异质结构电光效应的信息存储器件,实验制备了Au/BiFeO_3/LaAlO_3异质结构并研究了其电光效应。本文主要内容如下:1.概述了当前主要信息存储方式,总结了电光效应和电光晶体,说明BiFeO_3电光性质的优势及其在信息存储器件方面的应用价值,介绍了选题背景和意义。2.设计了BiFeO_3/金属薄膜异质结构,仿真计算了不同BiFeO_3薄膜厚度、入射角度的BiFeO_3/Au和BiFeO_3/Pt异质结构的光谱曲线和电光效应,发现了明显的共振吸收现象和电光调制特性,分析了各参数对膜系结构共振吸收的影响。3.基于BiFeO_3/Au异质结构显著的电光调制特性,结合铁电存储器的信息写入优势和光存储器的信息读出优势,设计了一种基于BiFeO_3/Au薄膜异质结构的“电写入,光读取”的信息存储器件。提出了存储器件的设计思路、原理以及结构组成,总结了存储器件的优点和实施方法;设计了基于透明导电玻璃ITO(indium-tin oxide)电极的信息写入方式。4.用脉冲激光镀膜方法制备了BiFeO_3/LaAlO_3薄膜异质结构,用椭圆偏振光谱测量方法研究其光学特性;用光刻技术和磁控溅射方法镀制了叉指结构Au电极,对BiFeO_3薄膜施加电压,发现了Au/BiFeO_3/LaAlO_3膜系结构的电光效应,并对其进行了细致的实验研究和分析。
[Abstract]:BiFeO _ 3) has obvious birefringent dispersion, and its photophysical properties are more abundant due to the low dimensional recombination of the heterostructure of the thin film. Therefore, it is of great significance to study the electro-optic effects of BiFeO_3 thin films and their heterostructures and to explore their applications in information storage devices. In this paper, the electro-optic effects of BiFeO_3 thin films and their heterostructures are studied, and an information storage device based on the electro-optic effects of BiFeO_3/Au thin films heterostructure is designed. The Au/BiFeO_3/LaAlO_3 heterostructures are fabricated experimentally and their electro-optic effects are studied. The main contents of this paper are as follows: 1. This paper summarizes the main information storage methods, summarizes electro-optic effect and electro-optic crystal, explains the advantages of electro-optic properties of BiFeO_3 and its application value in information storage devices, and introduces the background and significance of the selected topic. The heterostructure of BiFeO_3/ metal film is designed. The spectral curves and electro-optic effects of BiFeO_3/Au and BiFeO_3/Pt heterostructures with different BiFeO_3 film thickness and incident angle are calculated and the resonance absorption and electro-optic modulation characteristics are found. The influence of various parameters on the resonance absorption of the membrane system was analyzed. Based on the remarkable electro-optic modulation characteristics of BiFeO_3/Au heterostructure, combining the advantages of ferroelectric memory and optical memory information readout, a kind of information storage device based on BiFeO_3/Au thin film heterostructure is designed. The design idea, principle and structure of the memory device are presented, the advantages and implementation of the memory device are summarized, and the information writing method based on transparent conductive glass ITO(indium-tin oxide electrode is designed. 4. The heterostructure of BiFeO_3/LaAlO_3 thin film was prepared by pulsed laser deposition, and its optical properties were studied by elliptical polarization spectroscopy. Au electrode with cross finger structure was deposited by photolithography and magnetron sputtering, and the voltage was applied to the BiFeO_3 film. The electro-optic effect of Au/BiFeO_3/LaAlO_3 film system was found, and its detailed experimental study and analysis were carried out.
【学位授予单位】:国防科学技术大学
【学位级别】:硕士
【学位授予年份】:2014
【分类号】:TP333;O484
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