基于椭圆偏振显微镜的纳米级磁头润滑膜观测方法
发布时间:2018-04-22 11:10
本文选题:光学测量 + 润滑膜观测 ; 参考:《应用光学》2017年03期
【摘要】:针对磁头飞行导致液体润滑膜的转移研究以及润滑膜在磁头上的动态变化特性观测问题,基于改进的垂直物镜的椭圆偏振显微镜,提出起偏器相移方法的磁头表面润滑膜厚度计算模型,实现了润滑膜厚度的测量。实验以非极性润滑剂Z03覆盖的磁头为样品对椭圆偏振显微镜进行标定,以极性润滑剂Zdol4000作为样品,对其在磁头表面的去湿现象进行观察。该方法测量精度可达0.37nm,分辨力约0.36μm,可为其他纳米级薄膜观测提供一定的技术参考。
[Abstract]:Aiming at the study of liquid lubrication film transfer caused by magnetic head flight and the observation of dynamic characteristics of lubricating film on magnetic head, the elliptical polarization microscope based on improved vertical objective lens is proposed. A calculation model of lubricating film thickness on magnetic head surface based on phase shift method of polarizer is presented, and the thickness measurement of lubricating film is realized. The elliptical polarization microscope was calibrated with the magnetic head covered by non-polar lubricant Z03 and the dehumidification phenomenon on the magnetic head surface was observed with polar lubricant Zdol4000 as the sample. The precision of the method is 0.37 nm and the resolution is about 0.36 渭 m, which can provide some technical reference for other nanoscale thin films.
【作者单位】: 南京信息工程大学信息与控制学院;南京信息工程大学大气环境与装备技术协同创新中心;
【基金】:江苏省自然科学基金(BK20130989) 南京信息工程大学引进人才启动基金(2013R106)
【分类号】:TH742;TP333.35
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本文编号:1786925
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