引信用MEMS惯性开关技术研究
发布时间：2019-03-20 19:29
【摘要】：微机电(MEMS)惯性开关是对加速度的变化敏感并提供开关闭合动作的MEMS执行器,也称阈值开关、加速度开关或者g值开关。MEMS惯性开关不但体积小、响应快、能够捕捉微弱的信号而且很容易和外接电路融合,尤其适用于弹药的特殊环境。引信用MEMS惯性开关要求具有较强的抗过载性能、通用性、万向性等特殊要求,普通开关难以满足要求,且开关在工作过程中受多物理场耦合作用,其工作机理复杂,相关的设计理论不能满足需求,严重制约了MEMS惯性开关在引信中的应用。本文深入研究开关系统的静电力场、弹性力场、惯性力场、阻尼力场等多种物理场及耦合的基本问题,设计了两种MEMS惯性开关,分别满足引信的通用性和万向性需求。 分析悬臂梁式的MEMS惯性开关在弹性力场与静电场耦合作用下出现的吸合效应,并求解出吸合电压；分析静电力作用下悬臂梁系统的有效弹性系数减小的负弹簧效应。提出计算静电驱动悬臂梁结构变形的三种方法,等效刚度法、模态叠加法和有限元反馈法,分别应用等效刚度法和有限元反馈法求解静电力作用下悬臂梁的变形特性,并比较三种方法的优缺点和适用性；建立了惯性力、静电力和阻尼力耦合作用下悬臂梁开关的动态模型。引入表征流体性能的雷诺方程,建立了悬臂梁的流-固耦合的挤压膜阻模型,推导出了在静电力、惯性力耦合作用时,悬臂梁压膜阻尼系数的计算公式。 针对引信用惯性开关的通用性要求,设计了一种具有阈值可调功能的悬臂梁开关,该开关能够通过调节偏置电压以调节加速度阈值。基于静电驱动原理,推导出开关加速度阈值和偏置电压的关系；建立多物理场耦合下开关的系统级模型,对开关的准静态特性和动态特性进行系统级分析,研究可变阈值开关的基本性能。以500g为一档,调节加速度阈值范围为：500g～2500g,开关响应时间小于载荷持续时间的10%,开关接触时间大于300μs。 针对引信用惯性开关万向性的要求,提出了一种多弹性支撑的环形分布式万向惯性开关。建立了开关的动力学控制方程；对开关进行静态特性分析,基于能量法中的卡式定律和胡克定律,推导出S型悬臂梁刚度的计算公式并进行有限元仿真验证,结果表明理论推导计算值和有限元仿真值的相对误差小于3%,S型折叠悬臂梁的理论公式推导正确；对开关进行动态特性分析,研究多弹性支撑的环形万向惯性开关的基本性能。开关在700g加速度阈值作用下,响应时间为0.12ms,两电极接触时间为35μs。 介绍了多弹性支撑环形分布式MEMS万向惯性开关的加工工艺流程,研究了开关的检测技术；应用相移显微干涉法测量开关尺寸,通过尺寸检测得出悬臂梁的线宽误差分布及开关中可动电极和固定电极的间隙尺寸的加工误差范围,分析了尺寸误差对阈值加速度的影响；设计了一种冲击台试验用以测试开关的加速度阈值,该冲击台能够通过增加缓冲垫达到增加加速度脉冲宽度的目的；对开关进行了马歇特落锤实验,结果表明30000g加速度的高过载条件下,开关没有发生形变和断裂现象,仍然能保持良好的工作性能。
[Abstract]:A micro-electro-mechanical (MEMS) inertial switch is a MEMS actuator that is sensitive to changes in acceleration and provides a switch-on action, also known as a threshold switch, an acceleration switch, or a g-value switch. The MEMS inertial switch is small in size, fast in response, capable of capturing weak signals and being easy to fuse with external circuits, and is especially suitable for the special environment of the ammunition. The MEMS inertial switch for fuze is required to have strong anti-overload performance, general purpose, universal and other special requirements. The general switch is difficult to meet the requirements, and the switch is subjected to multi-physical field coupling in the working process, the working mechanism is complex, and the relevant design theory can not meet the requirement. The application of MEMS inertial switch in fuze is seriously restricted. In this paper, the basic problems of various physical fields and coupling of the electrostatic field, the elastic force field, the inertial force field and the damping force field of the switching system are studied in this paper. The two kinds of MEMS inertial switches are designed to meet the general and universal requirements of the fuze, respectively. The pull-in effect of a cantilever-type MEMS inertial switch under the coupling of the elastic force field and the electrostatic field is analyzed, and the pull-in voltage is solved; and the negative spring effect of the effective elastic coefficient reduction of the cantilever beam system under the action of the electrostatic force is analyzed. The three methods, the equivalent stiffness method, the mode superposition method and the finite element feedback method for calculating the deformation of the electrostatic-driven cantilever beam structure are proposed. The deformation characteristics of the cantilever beam under the action of the electrostatic force are solved by the equivalent stiffness method and the finite element feedback method, and the advantages and disadvantages and the application of the three methods are compared. the dynamic mode of the cantilever beam switch under the coupling action of the inertial force, the electrostatic force and the damping force is established, The flow-solid coupling of the cantilever beam is established by introducing the Reynolds equation for the performance of the fluid. The calculation of the damping coefficient of the cantilever beam is derived in the case of the coupling of the electrostatic force and the inertial force. In order to meet the general requirements of the inertial switch for fuze, a cantilever switch with a threshold-adjustable function is designed, which can adjust the bias voltage to adjust the acceleration. Based on the principle of electrostatic driving, the relationship between the threshold of the switch acceleration and the bias voltage is derived; the system-level model of the switch under the multi-physical field coupling is established, the quasi-static and dynamic characteristics of the switch are analyzed, and the basis of the variable threshold switch is studied. The performance is in the range of 500 g-2500g, the response time of the switch is less than 10% of the load duration, and the contact time of the switch is greater than 30 In order to meet the requirements of the universal performance of the inertial switch for fuze, a multi-elastic support ring-shaped distributed van is proposed. The dynamic control equation of the switch is established. The static characteristic analysis of the switch is carried out, and the calculation formula of the stiffness of the S-type cantilever beam is derived based on the card law and the Hooke's law in the energy method. The results show that the relative error of the theoretical derivation and the finite element simulation value is less than 3%, and the theoretical formula of the S-type folded cantilever beam is derived correctly; the dynamic characteristic analysis of the switch is carried out to study the multi-elastic support ring-type universal inertia switch Basic performance of the switch. The response time is 0.12ms and the contact time of the two electrodes is 0.12ms under the action of 700 g of acceleration threshold In this paper, the processing flow of multi-elastic support ring-shaped distributed MEMS universal inertial switch is introduced, the detection technology of the switch is studied, and the phase shift micro-interference is applied. The size of the switch is measured, the error distribution of the line width of the cantilever beam and the machining error range of the gap dimension of the movable electrode and the fixed electrode in the switch are obtained by size detection, the influence of the size error on the threshold acceleration is analyzed, and an impact table test is designed to test the opening. The acceleration threshold value of the switch can be increased by adding the cushion pad to the purpose of increasing the width of the acceleration pulse. The switch is subjected to a horse-rest drop hammer experiment, and the result shows that under the condition of high overload of 30000g of acceleration, the switch has no deformation and fracture phenomenon, and can still be kept
【学位授予单位】：长春理工大学
【学位级别】：博士
【学位授予年份】：2013
【分类号】：TH-39
本文编号：2444557
[Abstract]:A micro-electro-mechanical (MEMS) inertial switch is a MEMS actuator that is sensitive to changes in acceleration and provides a switch-on action, also known as a threshold switch, an acceleration switch, or a g-value switch. The MEMS inertial switch is small in size, fast in response, capable of capturing weak signals and being easy to fuse with external circuits, and is especially suitable for the special environment of the ammunition. The MEMS inertial switch for fuze is required to have strong anti-overload performance, general purpose, universal and other special requirements. The general switch is difficult to meet the requirements, and the switch is subjected to multi-physical field coupling in the working process, the working mechanism is complex, and the relevant design theory can not meet the requirement. The application of MEMS inertial switch in fuze is seriously restricted. In this paper, the basic problems of various physical fields and coupling of the electrostatic field, the elastic force field, the inertial force field and the damping force field of the switching system are studied in this paper. The two kinds of MEMS inertial switches are designed to meet the general and universal requirements of the fuze, respectively. The pull-in effect of a cantilever-type MEMS inertial switch under the coupling of the elastic force field and the electrostatic field is analyzed, and the pull-in voltage is solved; and the negative spring effect of the effective elastic coefficient reduction of the cantilever beam system under the action of the electrostatic force is analyzed. The three methods, the equivalent stiffness method, the mode superposition method and the finite element feedback method for calculating the deformation of the electrostatic-driven cantilever beam structure are proposed. The deformation characteristics of the cantilever beam under the action of the electrostatic force are solved by the equivalent stiffness method and the finite element feedback method, and the advantages and disadvantages and the application of the three methods are compared. the dynamic mode of the cantilever beam switch under the coupling action of the inertial force, the electrostatic force and the damping force is established, The flow-solid coupling of the cantilever beam is established by introducing the Reynolds equation for the performance of the fluid. The calculation of the damping coefficient of the cantilever beam is derived in the case of the coupling of the electrostatic force and the inertial force. In order to meet the general requirements of the inertial switch for fuze, a cantilever switch with a threshold-adjustable function is designed, which can adjust the bias voltage to adjust the acceleration. Based on the principle of electrostatic driving, the relationship between the threshold of the switch acceleration and the bias voltage is derived; the system-level model of the switch under the multi-physical field coupling is established, the quasi-static and dynamic characteristics of the switch are analyzed, and the basis of the variable threshold switch is studied. The performance is in the range of 500 g-2500g, the response time of the switch is less than 10% of the load duration, and the contact time of the switch is greater than 30 In order to meet the requirements of the universal performance of the inertial switch for fuze, a multi-elastic support ring-shaped distributed van is proposed. The dynamic control equation of the switch is established. The static characteristic analysis of the switch is carried out, and the calculation formula of the stiffness of the S-type cantilever beam is derived based on the card law and the Hooke's law in the energy method. The results show that the relative error of the theoretical derivation and the finite element simulation value is less than 3%, and the theoretical formula of the S-type folded cantilever beam is derived correctly; the dynamic characteristic analysis of the switch is carried out to study the multi-elastic support ring-type universal inertia switch Basic performance of the switch. The response time is 0.12ms and the contact time of the two electrodes is 0.12ms under the action of 700 g of acceleration threshold In this paper, the processing flow of multi-elastic support ring-shaped distributed MEMS universal inertial switch is introduced, the detection technology of the switch is studied, and the phase shift micro-interference is applied. The size of the switch is measured, the error distribution of the line width of the cantilever beam and the machining error range of the gap dimension of the movable electrode and the fixed electrode in the switch are obtained by size detection, the influence of the size error on the threshold acceleration is analyzed, and an impact table test is designed to test the opening. The acceleration threshold value of the switch can be increased by adding the cushion pad to the purpose of increasing the width of the acceleration pulse. The switch is subjected to a horse-rest drop hammer experiment, and the result shows that under the condition of high overload of 30000g of acceleration, the switch has no deformation and fracture phenomenon, and can still be kept
【学位授予单位】：长春理工大学
【学位级别】：博士
【学位授予年份】：2013
【分类号】：TH-39
【参考文献】
相关期刊论文 前10条
1 吝海锋;何洪涛;卞玉民;杨拥军;;一种新型无源MEMS万向碰撞开关[J];微纳电子技术;2009年06期
2 徐永青;杨拥军;;硅MEMS器件加工技术及展望[J];微纳电子技术;2010年07期
3 郭方敏,赖宗声,朱自强,贾铭,初建朋,范忠,朱荣锦,戈肖鸿,杨根庆,陆卫;悬臂式RF MEMS开关的设计与研制[J];半导体学报;2003年11期
4 张国炳,郝一龙,田大宇,刘诗美,王铁松,武国英;多晶硅薄膜应力特性研究[J];半导体学报;1999年06期
5 金磊,高世桥,李文杰;微加速度传感器硅微结构设计[J];传感器技术;2000年02期
6 张海涛,张斌;微电子机械系统技术及其应用[J];电子元件与材料;2002年04期
7 张健;李伟华;聂萌;;基于力学描述的MEMS器件行为模拟方法[J];电子器件;2006年04期
8 王培霞,贾育秦;从物理学发展看MEMS的跨学科研究[J];物理与工程;2005年05期
9 陈光焱;吴嘉丽;赵龙;王超;;基于阿基米德螺旋线的低g值微惯性开关(英文)[J];光学精密工程;2009年06期
10 石然;裘安萍;苏岩;;硅微谐振式加速度计的实现及性能测试[J];光学精密工程;2010年12期
相关博士学位论文 前1条
1 黄玉波;MEMS力学特性测试及可靠性分析中若干关键问题的研究[D];天津大学;2008年
，本文编号：2444557
本文链接：https://www.wllwen.com/kejilunwen/jixiegongcheng/2444557.html
