全反射式外差干涉测量微小应力的模拟分析

发布时间：2018-01-04 01:40

  本文关键词：全反射式外差干涉测量微小应力的模拟分析　出处：《激光与光电子学进展》2016年06期 　论文类型：期刊论文

  更多相关文章： 测量外差干涉 全反射 微小应力 光栅 数值模拟

【摘要】：提出一种利用多次全反射共光程外差干涉技术测量微小应力的光学方法。将一个具有两种偏振状态(s偏振与p偏振)的外差光源入射,通过光栅产生+1阶衍射光,光栅受拉应力的拉伸使周期发生变化,+1阶衍射光发生角度偏移。+1阶衍射光入射至长条棱镜内产生全反射,造成s偏振光与p偏振光之间相位差的变化,将该相位差代入推导得到的光栅应力关系中即可求出拉应力。利用棱镜内多次全反射可提高测量精度。根据模拟测量结果可得,入射角为-5°、光栅周期为10μm、全反射次数为30时,拉应力对相位的灵敏度为1.500N/(°),解析度为0.015N。该方法具有结构简单、测量快速、灵敏度高及不受外界干扰等优点。
[Abstract]:In this paper, an optical method for measuring micro stress by means of multiple total reflection common path heterodyne interferometry is proposed. An incident heterodyne light source with two polarization states (s and p) is incident. The first order diffraction light is generated by the grating, and the period changes with the tensile stress of the grating, and the angle deviation of the first order diffraction light occurs. The first order diffraction light incident into the long bar prism produces total reflection. The phase difference between the S-polarized light and the p-polarized light is changed. The tension stress can be obtained by inserting the phase difference into the derived grating stress relationship. The measurement accuracy can be improved by using multiple total reflections in the prism. According to the simulated measurement results, the incidence angle is -5 掳. When the grating period is 10 渭 m and the total reflection number is 30, the sensitivity of tensile stress to the phase is 1.500 N / (掳) and the resolution is 0.015 N. this method is simple in structure and rapid in measurement. High sensitivity and free from external interference and other advantages.
【作者单位】： 陕西理工学院数学与计算机科学学院;
【基金】：国家自然科学基金(11401357) 陕西理工学院科研计划(SLGKY12-04)
【分类号】：O348.1
【正文快照】： 1引言自激光出现以来,激光干涉已发展成为一项重要的光学测量技术,广泛应用于微小角度、微小位移、表面粗糙度、折射率及生物化学中光学活性等的测量[1-3]。近年来微型机电元件的高度发展,对精密机械、光电半导体等产业有着十分重要的影响,应力是许多工程应用或元件设计中一个，

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