精密运动平台减振系统设计与仿真软件开发

发布时间：2018-03-11 21:40

本文选题：精密运动平台　切入点：减振系统　出处：《华中科技大学》2016年硕士论文　论文类型：学位论文

【摘要】：精密运动平台是IC制造装备的核心部件,减振系统作为精密运动平台的一个不可或缺的组成部分,为平台的平稳运行提供超静环境保障,因而其设计成为精密运动平台设计中关键的环节。随着精密运动平台的运行精度不断提高达到了纳米级别,专业仿真分析软件工具的支持成为减振系统设计的关键。由于目前尚缺乏减振系统建模、仿真分析的专用软件,本文开发了精密运动平台减振系统设计与仿真软件。本文的主要工作如下:通过对精密运动平台减振系统设计过程进行分析,发现减振系统建模存在多领域统一建模、高精度、高效率三个关键点。另外,基于文件的减振系统设计实例管理繁琐不便,用户交互性差。针对这两个关键问题,论文提出了软件的两个主要功能需求,即模板库和实例池;然后设计了软件架构和数据结构;针对软件的模板库功能需求,先对减振系统组件进行动力学特性分析,然后在基于Modelica语言的多领域统一建模平台MWorks中建立组件的动力学模型,接着对组件模型进行封装,提取动力学特征参数形成组件模板从而建立减振系统模板库。用户基于该模板库能够快速的搭建减振系统模型同时能够保证建模的高精度。针对软件的实例池功能需求,通过对减振系统设计实例的研究,探明了设计实例包含的内容,并明确了设计实例中各部分内容的关系模型。同时还研究了设计实例检索的方法,为用户查阅实例和重用实例提供了方便。完成上面的研究工作之后,基于C++Builder开发了减振系统设计与仿真软件。最后根据特定的减振系统设计指标,搭建了减振系统模型并进行仿真分析,分析结果表明该模型能够满足设计要求,以此验证了软件功能。
[Abstract]:Precision motion platform is the core component of IC manufacturing equipment. As an indispensable part of precision motion platform, vibration absorption system provides ultra static environment guarantee for the smooth operation of the platform. As a result, its design has become a key link in the design of precision motion platform. With the continuous improvement of the precision of the precision motion platform, it has reached the nanometer level. The support of professional simulation and analysis software tool is the key to the design of vibration absorption system. Due to the lack of modeling of vibration absorption system at present, the special software for simulation analysis, The main work of this paper is as follows: through the analysis of the design process of the vibration absorption system of the precision motion platform, it is found that the modeling of the damping system has multi-domain unified modeling and high precision. There are three key points of high efficiency. In addition, the design case management of the vibration absorber system based on file is cumbersome and inconvenient, and the user interaction is poor. In view of these two key problems, the paper puts forward two main functional requirements of the software, that is, template library and case pool; Then, the software architecture and data structure are designed, and the dynamic characteristics of the vibration absorption system components are analyzed firstly according to the functional requirements of the template library, and then the dynamic model of the components is established in the multi-domain unified modeling platform MWorks based on the Modelica language. Then encapsulate the component model, Dynamic characteristic parameters are extracted to form the component template to establish the template library of the vibration absorption system. Based on the template library, the user can quickly build the model of the damping system and ensure the high accuracy of the modeling. Through the study of the design example of the vibration absorption system, the contents of the design example are found out, and the relation model of each part of the design example is clarified. At the same time, the method of the retrieval of the design case is also studied. After the above research work is completed, the design and simulation software of the damping system based on C Builder is developed. Finally, according to the specific design index of the damping system, The vibration absorption system model is built and simulated. The results show that the model can meet the design requirements and verify the function of the software.
【学位授予单位】：华中科技大学
【学位级别】：硕士
【学位授予年份】：2016
【分类号】：TP311.52;TN305.7

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