基于FIB制备金刚石刀具的精度表征基础研究

发布时间：2018-05-12 17:41

本文选题：聚焦离子束 + 金刚石刀具　；参考：《天津大学》2016年硕士论文

【摘要】：超精密加工领域的技术发展对高精度微细金刚石刀具需求越来越大,如何制备高精度的金刚石刀具以及实现刀具的加工质量评价,对推动超精密加工技术的发展具有重要意义。论文基于FIB/SEM平台,围绕高精度的金刚石刀具开展研究,分别对焦离子束加工机理、刀具的参数加工精度评价、以及刀具在切削过程中的纳米尺度微小挠度变化检测等开展了基础性的分析与研究:(1)对聚焦离子束的加工机理进行了基础性的分析,论文针对加工过程中离子束的入射规律,基于蒙特卡罗法模拟方法,对离子轰击碳、硅等典型的基底材料进行了仿真分析与建模,进而研究了不同离子束的入射能量、角度等加工参数对射程、能量损伤、横向离散等参数的影响规律,对优化FIB加工金刚石刀具提供了机理分析和解释。(2)搭建了基于SEM显微图像处理的刀具参数检测系统,该系统主要通过对采集所得到的刀具扫描电镜图像进行处理,以实现刀具质量的检测与评价,对图像增强、亚像素边缘定位等算法进行了设计与精度分析。研究实验结果表明,基于FIB制备的直线刃金刚石刀具的直线度良好,平均算术偏差为8.9 nm,偏离理想刃口的均方根波纹度为10 nm,由评价结果看出,本文所提出的方法可以实现对金刚石刀具制备精度的测量与评价。(3)为了实现金刚石刀具扫描电镜在线纳米切削的切削力探测,提出了基于SEM在线高分辨率显微表征,开展了单晶硅纳米切削过程中对金刚石刀具刀杆微小挠度波动的高精度实时检测,为SEM纳米切削平台的切削力检测提供重要支撑;该测量方法通过尺寸标定与目标匹配对切削过程中刀具的位置进行监测与分析,得到刀具刀杆挠度的变化规律曲线。论文通过对不同类型刀具图像以及纳米切削单晶硅的实时视频的分析,研究的检测系统实现了刀具参数以及纳米切削过程的挠度变化检测,有效推动了微细金刚石刀具纳米切削加工的基础研究发展。
[Abstract]:The development of ultra-precision machining technology demands more and more high-precision fine diamond cutting tools. How to prepare high-precision diamond tools and how to evaluate the machining quality of cutting tools are of great significance to promote the development of ultra-precision machining technology. Based on the FIB/SEM platform, the paper studies the high precision diamond cutting tools, and evaluates the machining accuracy of the machining parameters of the cutting tools by focusing on the mechanism of ion beam machining, respectively. The basic analysis and research on the mechanism of focused ion beam processing are carried out in this paper. The incident law of ion beam in machining process is discussed in this paper. Based on Monte Carlo simulation method, the simulation analysis and modeling of typical substrate materials such as ion bombardment with carbon and silicon are carried out, and the damage to range and energy of different ion beam processing parameters, such as incident energy and angle, is studied. The influence law of transverse discrete parameters provides a mechanism analysis and explanation for optimizing FIB machining diamond tools. A tool parameter detection system based on SEM microscopic image processing is set up. In this system, the scanning electron microscope images are processed to detect and evaluate the tool quality, and the algorithms of image enhancement and sub-pixel edge location are designed and the accuracy is analyzed. The experimental results show that the straightness of the linear edge diamond tool based on FIB is good, the average arithmetic deviation is 8.9 nm, and the RMS waviness of the diamond tool deviating from the ideal edge is 10 nm. The method proposed in this paper can be used to measure and evaluate the precision of diamond tool preparation. In order to detect the cutting force of diamond tool in scanning electron microscope (SEM), a new method based on SEM is proposed. In the process of monocrystalline silicon nano-cutting, the high-precision real-time measurement of the micro deflection fluctuation of diamond tool rod is carried out, which provides an important support for the cutting force detection of SEM nano-cutting platform. The tool position in cutting process is monitored and analyzed by dimension calibration and target matching, and the curve of tool rod deflection is obtained. Based on the analysis of different cutting tool images and real time video of nanocrystalline silicon, the tool parameters and the deflection of nanoscale cutting process are detected by the system studied in this paper. It has effectively promoted the basic research and development of micro-diamond cutting tools.
【学位授予单位】：天津大学
【学位级别】：硕士
【学位授予年份】：2016
【分类号】：TG711;TP391.41

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