基于亚像素扫描的超分辨技术在高分辨X射线显微镜中的应用

发布时间：2018-08-02 12:11

【摘要】：在不改变现有硬件条件的情况下,开展超分辨扫描重建方法,可以在不增加系统成本的基础上提高高分辨X射线显微镜的成像性能.设计了基于亚像素扫描的超分辨扫描模式,按照设计的调制方式进行亚像素位移的移动,采集多幅具有互补信息的低分辨率图像;然后基于系统的点扩散函数,对高分辨率图像进行复原;最后结合POCS超分辨重建算法重建出高分辨图像.实验结果表明,10倍光耦探测器下的衬度噪声比提高了20%左右,空间分辨力提高了0.2μm(约15%),细节分辨能力超过探测器像素尺寸1.35μm的限制,可以看到在低分辨率图像中看不到的细节.实验说明用超分辨技术提高高分辨X射线显微镜的分辨率是有意义的.
[Abstract]:Without changing the existing hardware conditions, the super-resolution scanning reconstruction method can improve the imaging performance of high-resolution X-ray microscope without increasing the system cost. The super-resolution scanning mode based on sub-pixel scanning is designed, and the sub-pixel displacement is moved according to the modulation mode designed, and several low-resolution images with complementary information are collected, and then based on the point diffusion function of the system, The high resolution image is restored and the high resolution image is reconstructed with POCS super-resolution reconstruction algorithm. The experimental results show that the contrast noise ratio increases by about 20%, the spatial resolution increases by 0.2 渭 m (about 15%), and the resolution of detail exceeds the pixel size of 1.35 渭 m, which can be seen in the low-resolution image. The experiment shows that it is significant to improve the resolution of high resolution X-ray microscope by super-resolution technique.
【作者单位】：天津大学精密仪器与光电子工程学院;天津三英精密仪器股份有限公司;中国科学院高能物理研究所;
【基金】：国家自然科学基金(No.61372144) 第61批博士后面上项目资助(No.2017M610996)~~
【分类号】：TH742;TP391.41

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