基于相位测量偏折术的反射镜三维面形测量

发布时间：2019-08-05 12:41

【摘要】：基于相位测量偏折术(PMD)测量原理,提出了一种简单、可靠、精度高的三维面形检测新方法,可以运用于非球面反射镜精磨与粗抛光阶段的面形检测。所提检测方法通过利用入射光线、小孔坐标,以及虚拟的辅助表面来得到待测反射镜面的绝对高度和梯度。测量时,在CCD相机前放置一个小孔光阑来实现小孔成像模型,并以该小孔的位置作为相机的位置,同时利用相移法并通过移动LCD显示屏一次,获得摄像机上每个像素点所对应的入射光线。该方法对实验设备的位置无特殊要求,不需要辅助器件,检测过程简单,检测结果可靠。而且,该检测方法采用虚拟的辅助表面对反射镜面进行检测而不是采用入射光线与反射光线的交点,不需要对相机光线进行标定,检测结果受标定误差的影响很小,所以该检测方法具有很高的检测精度。计算机仿真与初步实验验证了该方法的可行性。
[Abstract]:Based on the principle of (PMD) measurement of phase measurement deflection, a new 3D profile detection method with simple, reliable and high precision is proposed, which can be applied to the surface shape detection in the stage of fine grinding and rough polishing of aspherical mirror. The absolute height and gradient of the mirror surface to be measured are obtained by using incident light, small hole coordinates and virtual auxiliary surface. In the measurement, a small aperture is placed in front of the CCD camera to realize the small hole imaging model, and the position of the hole is taken as the position of the camera. At the same time, the incident light corresponding to each pixel point on the camera is obtained by using the phase shift method and moving the LCD display screen once. This method has no special requirements for the position of the experimental equipment, does not need auxiliary devices, the detection process is simple, and the detection results are reliable. Moreover, the virtual auxiliary surface is used to detect the mirror surface instead of the intersection point between the incident light and the reflected light, and the camera light does not need to be calibrated. The detection results are little affected by the calibration error, so the detection method has high detection accuracy. The feasibility of the method is verified by computer simulation and preliminary experiments.
【作者单位】：中国科学院长春光学精密机械与物理研究所中国科学院光学系统先进制造技术重点实验室;中国科学院大学;
【基金】：国家自然科学基金(61036015)
【分类号】：TP391.41

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