水电站监测传感元件的压电振动供能研究

发布时间：2018-03-24 02:13

本文选题：微机电(MEMS)　切入点：能量收集器　出处：《南昌工程学院》2017年硕士论文

【摘要】：随着微能源、MEMS、无线传感器网络等技术的飞速发展,使用压电转换振动能量收集原理(Piezoelectric Energy Harvester,PEH)收集流体机械能被越来越多的研究学者关注。压电振动能量收集主要应用于健康监控、无线传感器系统、微小型电机耦合器件等领域。同时我国是水电大国,水电装机量大,目前国内水电站内传感元件多是有源有线,所以在电站施工前就要做好提前布线的准备,很多极端的环境下又会存在布线困难的情况。而且多而杂的电线电缆又会造成相当大的成本消耗。对于一些极端环境的传感元件,当电池电量消耗殆尽时,电源的更换又成为一个比较大的问题和挑战。因此,研究压电振动能量收集技术在水电站中的应用具有广阔的应用前景和实用价值。本文研究了两种机制的压电振动能量采集器。在世界各国研究学者研究的基础上,制作了两种应用于水电站监测传感元件供电的压电能量收集器设计方案,通过理论与建模结合的方式提出了机电耦合模型,考虑实际应用的环境来优化了结构尺寸,围绕光刻刻蚀等MEMS技术,采用弹性性能和抗疲劳优异的磷青铜基片替代硅基片制作了分别应用于两个环境的涡激振动能量采集器与铜基振动能量采集器的实验样机,并搭建了两套用于实验测试的平台分别对两种器件进行测试。对所制备的实验样机进行了测试并得到了较高的输出性能。1、提出了两种应用于水电站监测传感元件供电的压电能量收集器设计方案。针对水电站监测传感器件的应用点,从结构类型、原料选用、工作模式等方面进行分析,结合制备工艺,设计了基于涡激振动与机械振动的两款能量采集器。2、通过理论与建模结合的方式提出了机电耦合模型,考虑实际应用的环境来优化了结构尺寸。3、研究了一种基于磷青铜基片的压电能量收集器的制备方法。论文采用导电环氧树脂作为中间粘结层实现PZT和磷青铜基片的结合;采用机械化学抛光等MEMS技术成功制备出了厚度可控、结构致密以及性能优异的压电能量收集器。4、对两个器件模型分别在水环境与机械电机振动环境中的输出性能进行了测试与阐述。主要的测试参数包括器件的谐振频率、开路电压输出与负载电压输出、最佳功率值、LED点亮实验以及电容充电特性。基于涡激振动的水下能量收集器在0.8m/s的水流中输出电压峰峰值可达44V,基于机械电机振动的压电能量收集器在3.0g的加速度振动中输出电压35V,并且在7g加速度的振动中也能有稳定的输出,达到了61.2V,功率密度8664μW/cm~3。
[Abstract]:With the rapid development of micro-energy sources, such as MEMS and wireless sensor networks, the application of piezoelectric Energy energy collection principle to the collection of fluid mechanical energy has attracted more and more researchers' attention. Piezoelectric vibration energy collection is mainly used in health monitoring. Wireless sensor systems, micro-motor couplers and other fields. At the same time, China is a large hydropower country, and the amount of hydropower installed is large. At present, most of the sensing elements in domestic hydropower stations are active wired, so we should prepare for the wiring in advance before the construction of the power station. In a lot of extreme environments, there will be a lot of difficult wiring, and a lot of miscellaneous wires and cables will cost a lot of money. For some sensor components in extreme environments, when the battery runs out of electricity, The replacement of power supply has become a big problem and challenge. The research on the application of piezoelectric vibration energy collection technology in hydropower stations has broad application prospect and practical value. In this paper, two kinds of piezoelectric vibration energy collectors are studied. Two design schemes of piezoelectric energy collector used in hydro-power station monitoring sensor power supply are made. The electromechanical coupling model is proposed by combining theory with modeling, and the structure size is optimized by considering the practical application environment. Around the MEMS technology such as lithography, the experimental prototypes of Vortex vibration energy collector and copper based vibration energy collector, which are used in two environments, have been made by replacing silicon substrate with phosphor bronze substrate with excellent elastic properties and fatigue resistance. Two sets of experimental test platforms were built to test the two kinds of devices respectively. The experimental prototype was tested and the output performance was higher. 1. Two kinds of sensors were proposed to monitor the hydropower station. Design scheme of piezoelectric energy collector for power supply. Two energy collectors based on vortex-induced vibration and mechanical vibration are designed by analyzing the structure type, selection of raw materials, working mode and so on. The electromechanical coupling model is proposed by combining theory with modeling. Considering the practical application environment, the structure size. 3 was optimized, and the preparation method of piezoelectric energy collector based on phosphor bronze substrate was studied. In this paper, conductive epoxy resin was used as the intermediate bonding layer to realize the combination of PZT and phosphor bronze substrate. The thickness is controlled by MEMS technology such as mechanochemical polishing. The piezoelectric energy collector with compact structure and excellent performance. The output performance of the two device models in water environment and mechanical motor vibration environment are tested and expounded respectively. The main test parameters include the resonant frequency of the device. Open circuit voltage output and load voltage output, The optimal power value and the characteristics of capacitive charging. The peak output voltage of underwater energy collector based on vortex-induced vibration in 0.8m/s water flow can reach 44V, and the piezoelectric energy collector based on mechanical motor vibration accelerates at 3.0g. The output voltage is 35V in the degree of vibration, and there is a steady output in the vibration of 7 g acceleration. The power density reached 61.2 V and the power density was 8664 渭 W / cm ~ 3.
【学位授予单位】：南昌工程学院
【学位级别】：硕士
【学位授予年份】：2017
【分类号】：TV736

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