聚合物材料SU8和二氧化硅混合集成热光开关的研究
发布时间：2019-02-12 12:34
【摘要】：随着光纤通信技术的快速发展,集成光电子器件特别是光开关由于制作简单、成品率高、成本低、易于集成等优点得到了广泛的应用。本论文首先介绍了集成光电子器件的发展、光开关的应用以及已有的热光开关器件的种类。与铌酸锂和III-V族半导体材料相比,二氧化硅材料和聚合物材料在材料成本和制作成本上更具优势。本论文的创新点在于有效地结合了SU8高热光系数和二氧化硅低传输损耗、低耦合损耗的优势,使得器件的功率损耗低、尺寸较小。相较于其他以聚合物材料作为芯层、二氧化硅作为下包层来实现电光、热光开关功能的器件,本论文提出的混合集成热光是将SU8波导作为MZI的双臂,二氧化硅波导作为3dB的功分器和合波器。SU8热光系数较高,当温度相同时SU8产生的有效折射率差较大,根据马赫曾德干涉仪基本原理可知,△neff较大时实现相同开关功能所需的传输臂长度较小,减小了器件的尺寸。首先,本文简单介绍了平面光波导的基本理论和数值计算方法。文中分析了解平板波导的解析方法和求解条形波导的近似方法,以及单模条件、弯曲损耗和模式耦合理论。为了解决复杂波导和器件的精确求解问题,须要采用数值计算方法,结合本文所要采用的波导结构,对器件仿真设计所用到的光束传播方法做了详细的理论分析介绍。其次,本文对混合集成热光开关的结构做了仿真分析和优化设计。文中给出了基于马赫曾德干涉仪型的混合集成热光开关SU8波导和二氧化硅波导的端面耦合方案,并利用模场叠加积分优化了方案中的波导结构。利用基于光束传播方法的Rsoft软件验证了优化过后的波导结构,两波导之间的耦合效率约为0.81。同时,用Rsoft软件确定了3dB功分器(合波器)采用多模干涉的结构以及其具体的结构参数。最后,根据仿真设计得到的波导结构,本文进行了混合集成热光开关的制作。采用了在二氧化硅波导图形上套刻窗口,旋涂套刻SU8波导的工艺制作方法。同时,采用两次匀胶的方法实现了在6μm二氧化硅台阶上旋涂光刻胶,成功制备了SU8-二氧化硅混合波导。测试结果显示,温度变化不到20℃即可实现开关功能,消光比可达到23dB
[Abstract]:With the rapid development of optical fiber communication technology, integrated optoelectronic devices, especially optical switches, have been widely used because of the advantages of simple fabrication, high yield, low cost and easy integration. In this paper, the development of integrated optoelectronic devices, the application of optical switches and the kinds of thermo-optical switch devices are introduced. Compared with lithium niobate and III-V semiconductor materials, silica and polymer materials have more advantages in material cost and fabrication cost. The innovation of this thesis lies in combining the advantages of high thermal optical coefficient of SU8 and low transmission loss of silicon dioxide and low coupling loss, which makes the power loss of the device low and the size smaller. Compared with other devices which use polymer material as core layer and silicon dioxide as lower cladding layer to realize electro-optic and thermo-optical switch function, the hybrid integrated thermo-optical device proposed in this paper uses SU8 waveguide as the double arm of MZI. Silicon dioxide waveguide is used as the power divider and waver of 3dB. The thermo-optical coefficient of SU8 is relatively high, and the difference of effective refractive index produced by SU8 is large when the temperature is the same. According to the basic principle of Mach Zende interferometer, we can know that, When the neff is larger, the length of the transmission arm needed to realize the same switch function is smaller, which reduces the size of the device. Firstly, the basic theory and numerical method of planar optical waveguide are introduced briefly. In this paper, the analytical method of planar waveguide and the approximate method for solving strip waveguide, as well as the theory of single mode condition, bending loss and mode coupling are analyzed. In order to solve the problem of accurate solution of complex waveguides and devices, a numerical calculation method is needed. Combined with the waveguide structure to be adopted in this paper, the beam propagation method used in the device simulation design is analyzed and introduced in detail. Secondly, the structure of hybrid integrated thermooptic switch is simulated and optimized. A hybrid integrated thermo-optical switch (SU8) waveguide and a silica waveguide based on Mach Zende interferometer are presented in this paper. The waveguide structure is optimized by mode field superposition integral. The optimized waveguide structure is verified by Rsoft software based on beam propagation method. The coupling efficiency between the two waveguides is about 0.81. At the same time, the structure of 3dB power divider using multimode interference and its specific structure parameters are determined by Rsoft software. Finally, according to the waveguide structure designed by simulation, the hybrid integrated thermo-optical switch is fabricated in this paper. The fabrication method of SU8 waveguide with spin coating is adopted in this paper. At the same time, the SU8- silica mixed waveguide was successfully fabricated by using the method of twice homogenizing. The photoresist was spin-coated on the 6 渭 m silica step. The test results show that the switch function can be realized by changing the temperature less than 20 鈩，
本文编号：2420447
[Abstract]:With the rapid development of optical fiber communication technology, integrated optoelectronic devices, especially optical switches, have been widely used because of the advantages of simple fabrication, high yield, low cost and easy integration. In this paper, the development of integrated optoelectronic devices, the application of optical switches and the kinds of thermo-optical switch devices are introduced. Compared with lithium niobate and III-V semiconductor materials, silica and polymer materials have more advantages in material cost and fabrication cost. The innovation of this thesis lies in combining the advantages of high thermal optical coefficient of SU8 and low transmission loss of silicon dioxide and low coupling loss, which makes the power loss of the device low and the size smaller. Compared with other devices which use polymer material as core layer and silicon dioxide as lower cladding layer to realize electro-optic and thermo-optical switch function, the hybrid integrated thermo-optical device proposed in this paper uses SU8 waveguide as the double arm of MZI. Silicon dioxide waveguide is used as the power divider and waver of 3dB. The thermo-optical coefficient of SU8 is relatively high, and the difference of effective refractive index produced by SU8 is large when the temperature is the same. According to the basic principle of Mach Zende interferometer, we can know that, When the neff is larger, the length of the transmission arm needed to realize the same switch function is smaller, which reduces the size of the device. Firstly, the basic theory and numerical method of planar optical waveguide are introduced briefly. In this paper, the analytical method of planar waveguide and the approximate method for solving strip waveguide, as well as the theory of single mode condition, bending loss and mode coupling are analyzed. In order to solve the problem of accurate solution of complex waveguides and devices, a numerical calculation method is needed. Combined with the waveguide structure to be adopted in this paper, the beam propagation method used in the device simulation design is analyzed and introduced in detail. Secondly, the structure of hybrid integrated thermooptic switch is simulated and optimized. A hybrid integrated thermo-optical switch (SU8) waveguide and a silica waveguide based on Mach Zende interferometer are presented in this paper. The waveguide structure is optimized by mode field superposition integral. The optimized waveguide structure is verified by Rsoft software based on beam propagation method. The coupling efficiency between the two waveguides is about 0.81. At the same time, the structure of 3dB power divider using multimode interference and its specific structure parameters are determined by Rsoft software. Finally, according to the waveguide structure designed by simulation, the hybrid integrated thermo-optical switch is fabricated in this paper. The fabrication method of SU8 waveguide with spin coating is adopted in this paper. At the same time, the SU8- silica mixed waveguide was successfully fabricated by using the method of twice homogenizing. The photoresist was spin-coated on the 6 渭 m silica step. The test results show that the switch function can be realized by changing the temperature less than 20 鈩，
本文编号：2420447
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