超高宽深比结构氮化硅波导的研究

发布时间：2017-12-27 15:10

本文关键词：超高宽深比结构氮化硅波导的研究　出处：《半导体光电》2017年04期 　论文类型：期刊论文

【摘要】：超高宽深比结构氮化硅波导具有低损耗和高偏振消光比的优异性能,是抑制集成光学陀螺中偏振噪声的可行性方案。文章基于FEM和FDTD方法对氮化硅波导的模场分布、弯曲损耗及光纤插入损耗进行了仿真分析,通过对波导截面结构的设计优化,并采用LPCVD和RIE微纳工艺在石英基底上成功制备了宽深比高达100的单模氮化硅波导。表征及通光测试验证了工艺可行性,对一长为12mm的氮化硅直波导测试得偏振消光比达3dB。研究结果对超高宽深比氮化硅波导在集成光学陀螺及相关偏振器件中的应用研究具有一定意义。
[Abstract]:The ultrahigh aspect ratio structure silicon nitride waveguide has excellent performance of low loss and high polarization extinction ratio. It is a feasible scheme to suppress polarization noise in integrated optical gyroscope. The FEM and FDTD methods based on silicon nitride waveguide mode field distribution, fiber bending loss and the insertion loss are analyzed. The design optimization of the cross section of the waveguide structure, and using LPCVD and RIE micro nano technology for single mode silicon nitride waveguide width to depth ratio of up to 100 were prepared on quartz substrate. The feasibility of the process is verified by the characterization and light test. The polarization extinction ratio of a silicon nitride straight waveguide with a long 12mm is 3dB. The research results are of certain significance for the application of ultra high width to depth ratio silicon nitride waveguide in integrated optical gyroscope and related polarization devices.
【作者单位】：北京航空航天大学光电技术研究所微纳测控与低维物理教育部重点实验室;
【基金】：国家自然科学基金项目(61473022)
【分类号】：TN252
【正文快照】： 0引言近年来,随着集成光学的发展和微纳工艺水平的提升,基于平面光波导的谐振式集成光学陀螺已经被提出并得到了不断发展[1-2]。与光纤陀螺和激光陀螺相比,集成光学陀螺在小型化和集成化方面有着巨大优势。集成光学陀螺中,介质光波导的传输特性显著影响着陀螺的性能。目前,集

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