基于光栅应变传感器的纳米测量机探针设计

发布时间：2017-12-31 13:12

本文关键词：基于光栅应变传感器的纳米测量机探针设计　出处：《应用光学》2017年03期 　论文类型：期刊论文

【摘要】：为了提高纳米坐标测量机探针的测量精度,且能满足对复杂曲面或微结构进行精确测量的要求,提出了一种新颖的基于微探针系统的光纤布拉格光栅(FBG)探针。该探针具有较高灵敏度和可重复性。提出该新型FBG探针,即探针里有一个熔融的球形顶端,FBG作为应变传感器内置在测杆上。介绍了光纤探针的基本原理,并利用有限元软件ANSYS 11对探针的应变分布在轴向和横向载荷两种典型配置分别进行了仿真分析,结果表明仿真分析和理论计算相吻合。通过实验对光纤探针的灵敏度和分辨率分别进行测试。实验结果表明,在轴向载荷条件下,用位移分辨率为1.5nm的压电换能器对探针进行性能测试,得到光纤探针的测量分辨率为60nm。即光纤探针具有较高的灵敏度和分辨率,其性能满足实际测量需要。
[Abstract]:In order to improve the measurement accuracy of nanometer probe coordinate measuring machine, and can satisfy the requirements for accurate measurement of complex surface or micro structure, this paper presents a micro probe system based on fiber Prague grating (FBG) novel probe. The probe has high sensitivity and repeatability. The new FBG probe, which is spherical the top of a melting probe, FBG as a strain sensor embedded in the rod. This paper introduces the basic principle of optical fiber probe, and the use of finite element software ANSYS 11 to probe the strain distribution in the axial and transverse load of two typical configuration are analyzed, the calculation results show that the simulation analysis and test theory consistent. Respectively through experiments on optical fiber probe sensitivity and resolution. The experimental results show that the axial load conditions, using the displacement resolution of the piezoelectric transducer 1.5nm of the probe It can be tested that the measurement resolution of the optical fiber probe is 60nm., that is, the optical fiber probe has high sensitivity and resolution, and its performance meets the actual measurement needs.

【作者单位】：安徽工业大学电气与信息工程学院;
【基金】：安徽省教育厅自然科学重点项目(KJ2015A058、KJ2013A054)
【分类号】：TN253;TP212
【正文快照】： 引言光纤布拉格光栅传感技术是近二十年来迅速发展起来的一项新技术,也是计量测试领域中的一个热门研究课题[1]。随着光纤增敏技术、光纤光栅刻制技术、波长探测解调技术的研究发展,越来越多的FBG传感器应用到测量工程中[2]。近年来,随着光学和光电子技术的发展,一些传统的测

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