温度传感器校准中激光光束均匀化研究

发布时间：2018-01-09 08:28

本文关键词：温度传感器校准中激光光束均匀化研究　出处：《激光杂志》2017年07期 　论文类型：期刊论文

【摘要】：在温度传感器校准中,用激光光束对其进行加热,由于激光呈高斯分布,为了使传感器受热均匀,需要能量均匀分布的激光光束。为此,研究了激光匀束的方法,最终选用结构简单、对入射光束变化不敏感且可以承受大功率的衍射型微透镜阵列对激光进行整形。运用ZEMAX光束仿真软件进行仿真分析,通过对子透镜尺寸、透镜间距离、光束发散角等因素的对比分析,优化出较合适的参数。搭建实验平台,对实际效果进行验证,得到一个不均匀度为8.9%,能量损耗为7%的一个平顶光束。减小传感器校准误差,同时极大的提高了激光的利用率。
[Abstract]:In the calibration of temperature sensor, the laser beam is heated by laser beam. Because the laser is distributed as Gao Si, in order to make the sensor heat evenly, the laser beam with uniform energy distribution is needed. The method of laser beam homogenization is studied, and the structure is simple. The laser is shaped by diffractive microlens array which is insensitive to the change of incident beam and can withstand high power. The ZEMAX beam simulation software is used to simulate and analyze the laser. The size of the sub-lens and the distance between the lenses are analyzed. Through comparative analysis of beam divergence angle and other factors, the more appropriate parameters are optimized. An experimental platform is built to verify the actual effect, and a non-uniformity degree of 8.9% is obtained. A flat-top beam with energy loss of 7%. The calibration error of the sensor is reduced and the laser utilization rate is greatly improved.
【作者单位】：中北大学;
【基金】：国家自然科学基金(51575499)
【分类号】：TN24;TP212
【正文快照】： 目前,温度传感器动态校准的方法主要有恒温水/油槽法、激波管法、热风洞法、激光法等。其中,激光法具有加热温度高、速度快等优点,非常适用于产生动态校准所需的激励温度。但是由于激光器产生的激光是椭圆形高斯分布的光束,导致在传感器加热面分布不均匀,对传感器的受热升温会

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