双激光沉积锗掺杂类金刚石膜的实验研究

发布时间：2018-01-18 02:23

本文关键词：双激光沉积锗掺杂类金刚石膜的实验研究　出处：《中国激光》2017年03期 　论文类型：期刊论文

【摘要】：提出了双激光沉积掺杂薄膜技术,利用准分子纳秒激光和飞秒激光分别烧蚀石墨和锗靶材,保持准分子纳秒激光的参数不变,而将飞秒激光的脉冲频率逐次由0提高至500 Hz,在硅基底上获得锗含量逐次增大的掺杂类金刚石膜。实验结果表明:随着锗掺杂量的提高,锗掺杂类金刚石膜的折射率略微增大,消光系数增大7.3倍;表面硬度呈近似的线性降低,降低幅度约为41.3%;内应力呈非线性减小并在某值趋于稳定,降低幅度约为78.1%。牢固度实验结果表明,锗掺杂量的提高可以增强类金刚石膜在基底上的附着性能,但不利于其对溶液的耐腐蚀性。研究结果为不同应用目的的掺杂类金刚石膜及其复合膜层的设计提供了实验基础,且研究方法具有很强的可扩展性,不仅仅限于实验所限薄膜范围。
[Abstract]:A double-laser deposition technique for doped films is proposed in which excimer nanosecond laser and femtosecond laser are used to ablation graphite and germanium targets respectively and the parameters of excimer nanosecond laser are kept unchanged. When the pulse frequency of femtosecond laser was increased from 0 to 500 Hz, the doped diamond-like carbon films with increasing germanium content were obtained on the silicon substrate. The experimental results show that the doping amount of germanium increases with the increase of the doping amount of germanium. The refractive index of germanium doped diamond-like carbon film increases slightly and the extinction coefficient increases 7.3 times. The hardness of the surface decreases linearly, and the decrease is about 41.3%. The internal stress decreases nonlinearly and tends to stabilize at a certain value. The experimental results show that the increase of germanium doping can enhance the adhesion of diamond-like carbon films on the substrate. The results provide experimental basis for the design of doped diamond-like carbon films and their composite films for different purposes, and the research method has a strong scalability. It is not limited to the experimental range of thin films.
【作者单位】：武汉军械士官学校光电技术研究所;
【分类号】：O484
【正文快照】： 类金刚石(DLC)膜具有高硬度、耐磨损、抗划伤、耐腐蚀等诸多优势,在力学、光学、电学、摩擦学等领域具有广泛的应用潜力[1]。与其他沉积方法相比,脉冲激光沉积(PLD)技术制备的无氢DLC膜具有更高的硬0303001-1度和化学稳定性。但是其内应力也很高,一般高于3GPa,甚至高于8GPa[2-

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