高灵敏度宽频带一维MEMS矢量水听器

发布时间：2018-02-11 01:25

本文关键词： 微电子机械系统(MEMS) 压阻传感器一维探测 ANSYS 共振频率　出处：《微纳电子技术》2017年10期 　论文类型：期刊论文

【摘要】：针对目前纤毛式MEMS矢量水听器灵敏度和带宽的相互制约,无法实现在高灵敏度的情况下还能有较大的可测带宽。基于此,设计了一种单梁结构的一维MEMS矢量水听器,经理论分析和ANSYS仿真分析,确定了微结构的尺寸,仿真结果显示有挖空式结构较无挖空式结构在X轴最大应力上提高了5.12%,探测带宽增大了53.26%。并对挖空式微结构进行了工艺设计,简化了工艺流程,提高了成品率。最后,用矢量水听器校准装置进行测量,实验结果表明,该一维MEMS矢量水听器具有20~2 000 Hz的可测带宽,满足灵敏度每频程6 dB的增长趋势,具有良好的"8"字型指向性,凹点深度为-32.4 dB。
[Abstract]:In view of the mutual restriction of sensitivity and bandwidth of ciliated MEMS vector hydrophone, it is impossible to achieve a large measurable bandwidth under the condition of high sensitivity. Based on this, a one-dimensional MEMS vector hydrophone with single beam structure is designed. Through theoretical analysis and ANSYS simulation analysis, the size of the microstructure is determined. The simulation results show that the maximum stress of the X axis is increased by 5.12 and the detection bandwidth is increased by 53.26.The technological design of the hollowed structure is carried out. The process is simplified and the yield of finished product is improved. Finally, the measurement is carried out with a vector hydrophone calibration device. The experimental results show that the one-dimensional MEMS vector hydrophone has a measurable bandwidth of 20 ~ 2 000 Hz, and satisfies the increasing trend of the sensitivity of 6 dB per frequency range. It has good directivity of "8" font, and the depth of concave point is -32.4 dB.
【作者单位】：中北大学仪器科学与动态测试教育部重点实验室;
【基金】：国家自然科学基金资助项目(61127008) 国家重点研发计划资助项目(2016YFC0101900) 中国博士后科学基金资助项目(176704) 山西省应用基础研究资助项目(201601D011035)
【分类号】：TB565.1

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